Invention Application
- Patent Title: ACTUATOR AND METHOD FOR MANUFACTURING THE SAME
- Patent Title (中): 执行器及其制造方法
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Application No.: US12607341Application Date: 2009-10-28
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Publication No.: US20100045137A1Publication Date: 2010-02-25
- Inventor: Mitsuhiro YODA , Keiji ISAMOTO , Hiroshi TOSHIYOSHI
- Applicant: Mitsuhiro YODA , Keiji ISAMOTO , Hiroshi TOSHIYOSHI
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: SEIKO EPSON CORPORATION,THE UNIVERSITY OF TOKYO
- Current Assignee: SEIKO EPSON CORPORATION,THE UNIVERSITY OF TOKYO
- Current Assignee Address: JP Tokyo JP Tokyo
- Priority: JP2005-160530 20050531
- Main IPC: H02N11/00
- IPC: H02N11/00

Abstract:
An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32. The fixed portions 33 and 34 are affixed to the supporting substrate 4 in a condition that they are deflected toward the supporting substrate 4 with respect to the second supporting portions 31 and 32 while bending the bridge portions 35 and 36, thereby initially deflecting the fixed comb electrodes 331 and 341 so as to be out of alignment with the movable comb electrodes 211 and 212 in a thickness direction of the supporting substrate 4.
Public/Granted literature
- US07808150B2 Actuator having deflected fixed comb electrodes and movable comb electrodes Public/Granted day:2010-10-05
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