发明申请
US20100055609A1 COMPOUND, METHOD FOR PREPARING THE COMPOUND AND RESIST COMPOSITION CONTAINING THE COMPOUND
有权
化合物，用于制备化合物的方法和含有该化合物的抗蚀剂组合物
- 专利标题： COMPOUND, METHOD FOR PREPARING THE COMPOUND AND RESIST COMPOSITION CONTAINING THE COMPOUND
- 专利标题（中）： 化合物，用于制备化合物的方法和含有该化合物的抗蚀剂组合物
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申请号： US12552085申请日： 2009-09-01
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公开(公告)号： US20100055609A1公开(公告)日： 2010-03-04
- 发明人: Ichiki TAKEMOTO , Nobuo Ando , Mitsuhiro Hata
- 申请人： Ichiki TAKEMOTO , Nobuo Ando , Mitsuhiro Hata
- 优先权： JP2008-225072 20080902
- 主分类号： G03F7/004
- IPC分类号： G03F7/004 ; C07C69/63
摘要：
A compounds represented by the Formula (I) or the Formula (I′). wherein Z1 and Z2 independently represent a hydrogen atom, a C1 to C12 alkyl group or a C3 to C12 cyclic saturated hydrocarbon group, provided that at least one of Z1 and Z2 represent a C1 to C12 alkyl group or a C3 to C12 cyclic saturated hydrocarbon group; rings Y1 and Y2 independently represents an optionally substituted C3 to C20 alicyclic hydrocarbon group; Q1 to Q4 and Q′1 to Q′4 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group; and m and n independently represent an integer of 0 to 5.