- 专利标题: Laser processing method and laser processing apparatus
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申请号: US12461969申请日: 2009-08-31
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公开(公告)号: US20100055876A1公开(公告)日: 2010-03-04
- 发明人: Fumitsugu Fukuyo , Kenshi Fukumitsu , Naoki Uchiyama , Toshimitsu Wakuda , Kazuhiro Atsumi , Kenichi Muramatsu
- 申请人: Fumitsugu Fukuyo , Kenshi Fukumitsu , Naoki Uchiyama , Toshimitsu Wakuda , Kazuhiro Atsumi , Kenichi Muramatsu
- 申请人地址: JP Hamamatsu-shi
- 专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人地址: JP Hamamatsu-shi
- 优先权: JP2000-278306 20000913
- 主分类号: H01L21/268
- IPC分类号: H01L21/268 ; B23K26/00
摘要:
A laser beam machining method and a laser beam machining device capable of cutting a work without producing a fusing and a cracking out of a predetermined cutting line on the surface of the work, wherein a pulse laser beam is radiated on the predetermined cut line on the surface of the work under the conditions causing a multiple photon absorption and with a condensed point aligned to the inside of the work, and a modified area is formed inside the work along the predetermined determined cut line by moving the condensed point along the predetermined cut line, whereby the work can be cut with a rather small force by cracking the work along the predetermined cut line starting from the modified area and, because the pulse laser beam radiated is not almost absorbed onto the surface of the work, the surface is not fused even if the modified area is formed.
公开/授权文献
- US08283595B2 Laser processing method and laser processing apparatus 公开/授权日:2012-10-09
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