发明申请
- 专利标题： Piezoelectric pump and fluid transferring system
- 专利标题（中）： 压电泵和流体输送系统
-
申请号： US12585208申请日： 2009-09-08
-
公开(公告)号： US20100059127A1公开(公告)日： 2010-03-11
- 发明人: Makoto Shibata , Takeshi Wada , Michihiro Kumagae
- 申请人： Makoto Shibata , Takeshi Wada , Michihiro Kumagae
- 申请人地址： JP TOKYO
- 专利权人： TDK CORPORATION
- 当前专利权人： TDK CORPORATION
- 当前专利权人地址： JP TOKYO
- 优先权： JP2008-230471 20080909; JP2008-230472 20080909; JP2009-065114 20090317
- 主分类号： F04B43/04
- IPC分类号： F04B43/04
摘要：
To provide a piezoelectric pump including: a structure including a piezoelectric element and a support member that supports the piezoelectric element; and a first substrate and a second substrate that sandwich the structure, wherein the piezoelectric pump has: a pump chamber surrounded by the second substrate and the structure; and a first opening and a second opening that are communicated with the pump chamber, and wherein a space is provided so that the structure flexes in a direction opposite to the pump chamber according to an operation of the piezoelectric element.
信息查询
