发明申请
- 专利标题: Process and System for Providing Acetylene
- 专利标题(中): 提供乙炔的工艺和体系
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申请号: US12554052申请日: 2009-09-04
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公开(公告)号: US20100069689A1公开(公告)日: 2010-03-18
- 发明人: Timothy John Maykut , Suhas Narayan Ketkar , Benjamin James Arthur Inman , John Irven , Eugene Joseph Karwacki, JR. , Neil Alexander Downie
- 申请人: Timothy John Maykut , Suhas Narayan Ketkar , Benjamin James Arthur Inman , John Irven , Eugene Joseph Karwacki, JR. , Neil Alexander Downie
- 申请人地址: US PA Allentown
- 专利权人: Air Products and Chemicals, Inc.
- 当前专利权人: Air Products and Chemicals, Inc.
- 当前专利权人地址: US PA Allentown
- 主分类号: C07C11/24
- IPC分类号: C07C11/24 ; B01D53/14
摘要:
A system and a process for providing acetylene, preferably at a high purity level (e.g., comprising 100 parts per million (“ppm”), or 10 ppm, or 1 ppm, or 100 parts per billion (“ppb”), or 10 ppb, or 1 ppb or less of solvent), to a point of use, such as a semiconductor manufacturing process, is described herein. In one aspect, there is provided a process for providing a process for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising: providing an acetylene feed stream comprising acetylene and solvent at a temperature ranging from 20° C. to −50° C.; and introducing the acetylene feed stream to a purifier at a temperature ranging from −50° C. to 30° C. to remove at least a portion of the solvent contained therein and provide the high purity acetylene.
公开/授权文献
- US08129577B2 Process and system for providing acetylene 公开/授权日:2012-03-06
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