发明申请
- 专利标题: Method for manufacturing a stamper
- 专利标题(中): 制造压模的方法
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申请号: US12585756申请日: 2009-09-24
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公开(公告)号: US20100072069A1公开(公告)日: 2010-03-25
- 发明人: Takuya Shimada , Shinobu Sugimura , Yoshiyuki Kamata
- 申请人: Takuya Shimada , Shinobu Sugimura , Yoshiyuki Kamata
- 优先权: JP2008-245967 20080925
- 主分类号: C25D1/10
- IPC分类号: C25D1/10
摘要:
A method for manufacturing an imprint stamper includes the steps of forming a first electroformed layer on a concavo-convex pattern of an original disk with the pattern, peeling off the first electroformed layer to provide a first stamper, forming a second electroformed layer on a concavo-convex pattern of the first stamper, peeling off the second electroformed layer to provide a second stamper, forming a third electroformed layer on a concavo-convex pattern of the second stamper, and peeling off the third electroformed layer to provide a third stamper. In addition, a conductive film is formed at least on one of a bottom of the concave portion and a top surface of the convex portion of the concavo-convex pattern at least in one of the first stamper and the second stamper.
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