利索-全球专利检索

  1. 登录
  2. 注册
发明申请
US20100075248A1 BOTTOM ANTIREFLECTIVE COATINGS EXHIBITING ENHANCED WET STRIP RATES, BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS FOR FORMING BOTTOM ANTIREFLECTIVE COATINGS, AND METHODS FOR FABRICATING THE SAME 有权
底部抗反射涂层展示增强的湿度条纹率，底部抗反射涂层组合物，用于形成底部抗反射涂层及其制造方法

BOTTOM ANTIREFLECTIVE COATINGS EXHIBITING ENHANCED WET STRIP RATES, BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS FOR FORMING BOTTOM ANTIREFLECTIVE COATINGS, AND METHODS FOR FABRICATING THE SAME
摘要：
Bottom antireflective coating (BARC) that exhibit enhanced wet strip rates, BARC compositions for fabricating such BARCs, and methods for manufacturing such BARC compositions are provided. According to one exemplary embodiment, a bottom antireflective coating (BARC) composition comprises an inorganic-based compound, an absorbing material, and a wet strip-rate modifier combination. The wet strip-rate modifier composition comprises a combination of a short chain linear alcohol and dipropylene glycol (DPG), a combination of the short chain linear alcohol and tetraethylene glycol (TEG), a combination of DPG and TEG, or a combination of the short chain linear alcohol, DPG, and TEG.
摘要（中）：

提供了表现出增强的湿条带速率的底部抗反射涂层（BARC），用于制造这种BARC的BARC组合物以及用于制造这种BARC组合物的方法。 根据一个示例性实施方案，底部抗反射涂层（BARC）组合物包含无机基化合物，吸收材料和湿剥离率调节剂组合。 湿剥离率调节剂组合物包括短链线性醇和二丙二醇（DPG）的组合，短链线性醇和四甘醇（TEG）的组合，DPG和TEG的组合，或组合的 短链线性醇，DPG和TEG。

公开/授权文献
信息查询
Global Dossier Espacenet
0/0