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    Bottom antireflective coatings exhibiting enhanced wet strip rates, bottom antireflective coating compositions for forming bottom antireflective coatings, and methods for fabricating the same
    1.
    发明授权
    Bottom antireflective coatings exhibiting enhanced wet strip rates, bottom antireflective coating compositions for forming bottom antireflective coatings, and methods for fabricating the same 有权
    表现出增强的湿条带率的底部抗反射涂层，用于形成底部抗反射涂层的底部抗反射涂料组合物及其制造方法

    公开(公告)号：US07955782B2

    公开(公告)日：2011-06-07

    申请号：US12234849

    申请日：2008-09-22

    申请人： Sudip Mukhopadhyay ,  Joseph Kennedy ,  Yamini Pandey ,  Jelena Sepa

    发明人： Sudip Mukhopadhyay ,  Joseph Kennedy ,  Yamini Pandey ,  Jelena Sepa

    IPC分类号： G03F7/11

    CPC分类号： G03F7/091 ,  G03F7/0752 ,  Y10S438/952

    摘要： Bottom antireflective coating (BARC) that exhibit enhanced wet strip rates, BARC compositions for fabricating such BARCs, and methods for manufacturing such BARC compositions are provided. According to one exemplary embodiment, a bottom antireflective coating (BARC) composition comprises an inorganic-based compound, an absorbing material, and a wet strip-rate modifier combination. The wet strip-rate modifier composition comprises a combination of a short chain linear alcohol and dipropylene glycol (DPG), a combination of the short chain linear alcohol and tetraethylene glycol (TEG), a combination of DPG and TEG, or a combination of the short chain linear alcohol, DPG, and TEG.

    摘要翻译： 提供了表现出增强的湿条带速率的底部抗反射涂层（BARC），用于制造这种BARC的BARC组合物以及用于制造这种BARC组合物的方法。 根据一个示例性实施方案，底部抗反射涂层（BARC）组合物包含无机基化合物，吸收材料和湿剥离率调节剂组合。 湿剥离率调节剂组合物包括短链线性醇和二丙二醇（DPG）的组合，短链线性醇和四甘醇（TEG）的组合，DPG和TEG的组合，或组合的 短链线性醇，DPG和TEG。

    BOTTOM ANTIREFLECTIVE COATINGS EXHIBITING ENHANCED WET STRIP RATES, BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS FOR FORMING BOTTOM ANTIREFLECTIVE COATINGS, AND METHODS FOR FABRICATING THE SAME
    2.
    发明申请
    BOTTOM ANTIREFLECTIVE COATINGS EXHIBITING ENHANCED WET STRIP RATES, BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS FOR FORMING BOTTOM ANTIREFLECTIVE COATINGS, AND METHODS FOR FABRICATING THE SAME 有权
    底部抗反射涂层展示增强的湿度条纹率，底部抗反射涂层组合物，用于形成底部抗反射涂层及其制造方法

    公开(公告)号：US20100075248A1

    公开(公告)日：2010-03-25

    申请号：US12234849

    申请日：2008-09-22

    申请人： Sudip Mukhopadhyay ,  Joseph Kennedy ,  Yamini Pandey ,  Jelena Sepa

    发明人： Sudip Mukhopadhyay ,  Joseph Kennedy ,  Yamini Pandey ,  Jelena Sepa

    IPC分类号： G03F7/00

    CPC分类号： G03F7/091 ,  G03F7/0752 ,  Y10S438/952

    摘要： Bottom antireflective coating (BARC) that exhibit enhanced wet strip rates, BARC compositions for fabricating such BARCs, and methods for manufacturing such BARC compositions are provided. According to one exemplary embodiment, a bottom antireflective coating (BARC) composition comprises an inorganic-based compound, an absorbing material, and a wet strip-rate modifier combination. The wet strip-rate modifier composition comprises a combination of a short chain linear alcohol and dipropylene glycol (DPG), a combination of the short chain linear alcohol and tetraethylene glycol (TEG), a combination of DPG and TEG, or a combination of the short chain linear alcohol, DPG, and TEG.

    摘要翻译： 提供了表现出增强的湿条带速率的底部抗反射涂层（BARC），用于制造这种BARC的BARC组合物以及用于制造这种BARC组合物的方法。 根据一个示例性实施方案，底部抗反射涂层（BARC）组合物包含无机基化合物，吸收材料和湿剥离率调节剂组合。 湿剥离率调节剂组合物包括短链线性醇和二丙二醇（DPG）的组合，短链线性醇和四甘醇（TEG）的组合，DPG和TEG的组合，或组合的 短链线性醇，DPG和TEG。