Invention Application
- Patent Title: Flow Sensor and Method of Fabrication
- Patent Title (中): 流量传感器及其制作方法
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Application No.: US12243941Application Date: 2008-10-01
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Publication No.: US20100078753A1Publication Date: 2010-04-01
- Inventor: Mehran Mehregany , Nelsimar Moura Vandelli, JR.
- Applicant: Mehran Mehregany , Nelsimar Moura Vandelli, JR.
- Applicant Address: US MN St. Paul
- Assignee: FLOWMEMS, INC.
- Current Assignee: FLOWMEMS, INC.
- Current Assignee Address: US MN St. Paul
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L29/66
Abstract:
A method for forming a flow sensor having self-supported heat-carrying elements is disclosed. Self-supported heat-carrying elements are capable of operating with higher thermal efficiency, enabling lower power consumption and higher sensitivity, due to a lack of heat loss into a supporting membrane. Self-supported heat-carrying elements facilitate wider operating temperature range and compatibility with harsh media.
Information query
IPC分类:
