发明申请
- 专利标题: METHOD AND SYSTEM FOR OPERATING A MASS FLOW CONTROLLER
- 专利标题(中): 用于操作质量流量控制器的方法和系统
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申请号: US12238879申请日: 2008-09-26
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公开(公告)号: US20100080262A1公开(公告)日: 2010-04-01
- 发明人: R. Mike McDonald
- 申请人: R. Mike McDonald
- 申请人地址: US CO Fort Collins
- 专利权人: ADVANCED ENERGY INDUSTRIES, INC.
- 当前专利权人: ADVANCED ENERGY INDUSTRIES, INC.
- 当前专利权人地址: US CO Fort Collins
- 主分类号: G01K7/00
- IPC分类号: G01K7/00
摘要:
A system and method for operating a mass flow controller is described. One embodiment validates the operation of a mass flow controller thermal sensor, including detecting zero drift and span drift in the sensor by comparing the thermal sensor output to a pressure sensor output. In one embodiment, each sensor provides a signal to a digital controller or other processing unit and the controller calculates the mass flow rates of a gas flowing through the unit as measured by the sensors. The mass flow rates may then be compared to determine if one of the thermal sensor is operating properly.
公开/授权文献
- US07826986B2 Method and system for operating a mass flow controller 公开/授权日:2010-11-02
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