发明申请
US20100080262A1 METHOD AND SYSTEM FOR OPERATING A MASS FLOW CONTROLLER 有权
用于操作质量流量控制器的方法和系统

METHOD AND SYSTEM FOR OPERATING A MASS FLOW CONTROLLER
摘要:
A system and method for operating a mass flow controller is described. One embodiment validates the operation of a mass flow controller thermal sensor, including detecting zero drift and span drift in the sensor by comparing the thermal sensor output to a pressure sensor output. In one embodiment, each sensor provides a signal to a digital controller or other processing unit and the controller calculates the mass flow rates of a gas flowing through the unit as measured by the sensors. The mass flow rates may then be compared to determine if one of the thermal sensor is operating properly.
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