发明申请
- 专利标题: LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE MEDIUM
- 专利标题(中): 液体加工设备,液体加工方法和储存介质
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申请号: US12596882申请日: 2008-12-12
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公开(公告)号: US20100083986A1公开(公告)日: 2010-04-08
- 发明人: Yuji Kamikawa , Norihiro Ito , Jiro Higashijima
- 申请人: Yuji Kamikawa , Norihiro Ito , Jiro Higashijima
- 申请人地址: JP Minato-ku
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Minato-ku
- 优先权: JP2007-337053 20071227; JP2008-203391 20080806
- 国际申请: PCT/JP2008/072626 WO 20081212
- 主分类号: B08B3/08
- IPC分类号: B08B3/08 ; B08B13/00 ; B08B7/00
摘要:
A liquid processing apparatus includes: a hollow holding plate configured to hold an object to be processed; a hollow outer rotational shaft fixedly connected to the holding plate; a rotary drive part configured to rotate the outer rotational shaft; and a lift pin plate disposed in a hollow space of the holding plate, and having a lift pin configured to support the object to be processed. Inside the lift pin plate, a cleaning-liquid supply part configured to supply a cleaning liquid is extended. Connected to the lift pin plate is a lifting member configured to locate the lift pin plate on an upper position and a lower position. When located on the lower position, the lift pin plate receives a force of the rotary drive part for rotating the outer rotational shaft so that the lift pin plate is rotated.
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