发明申请
- 专利标题： HYDROGEN SENSOR AND METHOD FOR MANUFACTURING THE SAME
- 专利标题（中）： 氢传感器及其制造方法
-
申请号： US12521234申请日： 2007-12-28
-
公开(公告)号： US20100089123A1公开(公告)日： 2010-04-15
- 发明人: Katsuhiko Fukui
- 申请人： Katsuhiko Fukui
- 申请人地址： JP TOKYO
- 专利权人： MIKUNI CORPORATION
- 当前专利权人： MIKUNI CORPORATION
- 当前专利权人地址： JP TOKYO
- 优先权： JP2006-356334 20061228
- 国际申请： PCT/JP2007/075261 WO 20071228
- 主分类号： G01N7/00
- IPC分类号： G01N7/00 ; C23C14/34 ; C23C16/00
摘要：
A hydrogen sensor (100) is provided with a substrate (2), a detection film (4) formed on the substrate (2), and a hydrogen permeable protective film (10) formed on the detection film (4). The detection film (4) is composed of a first ceramic (6) and rare-earth metal particles (8) dispersed in the first ceramic (6). The protective film (10) is composed of a second ceramic (12) and hydrogen permeable metal particles (14) dispersed in the second ceramic (12). Preferably, the thickness of the detection film (4) is 5 to 1,000 nm, and the thickness of the hydrogen permeable protective film (10) is 5 to 40 nm.
公开/授权文献
信息查询
