发明申请
- 专利标题: METHOD OF MANUFACTURING SEMICONDUCTOR NANOWIRE SENSOR DEVICE AND SEMICONDUCTOR NANOWIRE SENSOR DEVICE MANUFACTURED ACCORDING TO THE METHOD
- 专利标题(中): 制造半导体纳米传感器器件的方法和根据该方法制造的半导体纳米传感器器件
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申请号: US12494846申请日: 2009-06-30
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公开(公告)号: US20100090197A1公开(公告)日: 2010-04-15
- 发明人: Chan-Woo PARK , Chang-Geun AHN , Jong-Heon YANG , In-Bok BAEK , Chil-Seong AH , An-Soon KIM , Tae-Youb KIM , Gun-Yong SUNG , Seon-Hee PARK
- 申请人: Chan-Woo PARK , Chang-Geun AHN , Jong-Heon YANG , In-Bok BAEK , Chil-Seong AH , An-Soon KIM , Tae-Youb KIM , Gun-Yong SUNG , Seon-Hee PARK
- 申请人地址: KR Daejeon
- 专利权人: Electonics and Telecommunications Research Institute
- 当前专利权人: Electonics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 优先权: KR10-2008-0099614 20081010
- 主分类号: H01L29/12
- IPC分类号: H01L29/12 ; H01L21/335
摘要:
Provided are a method of manufacturing a semiconductor nanowire sensor device and a semiconductor nanowire sensor device manufactured according to the method. The method includes preparing a first conductive type single crystal semiconductor substrate, forming a line-shaped first conductive type single crystal pattern from the first conductive type single crystal semiconductor substrate, forming second conductive type epitaxial patterns on both sidewalls of the first conductive type single crystal pattern, and forming source and drain electrodes at both ends of the second conductive type epitaxial patterns.
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