发明申请
US20100092728A1 LAMINATE, AND POLISHING MATERIAL AND GRINDING MATERIAL USING THE SAME, AND METHOD FOR PRODUCING THE LAMINATE
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层压材料,抛光材料和使用其的研磨材料以及生产层压板的方法
- 专利标题: LAMINATE, AND POLISHING MATERIAL AND GRINDING MATERIAL USING THE SAME, AND METHOD FOR PRODUCING THE LAMINATE
- 专利标题(中): 层压材料,抛光材料和使用其的研磨材料以及生产层压板的方法
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申请号: US12445210申请日: 2007-10-12
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公开(公告)号: US20100092728A1公开(公告)日: 2010-04-15
- 发明人: Masataka Hasegawa , Kazuo Tsugawa , Masatou Ishihara , Yoshinori Koga
- 申请人: Masataka Hasegawa , Kazuo Tsugawa , Masatou Ishihara , Yoshinori Koga
- 优先权: JP2006-279814 20061013
- 国际申请: PCT/JP2007/069999 WO 20071012
- 主分类号: B24D3/00
- IPC分类号: B24D3/00
摘要:
The invention provides a laminate capable of polishing and grinding the surface of a material having a high hardness such as diamond, sapphire or hard carbon film, rapidly and in a simplified manner with high planarity and high accuracy, utilizing the high adhesiveness to substrates, the hardness and the surface planarity that a carbon film has, but using neither diamond abrasive grains nor alkali slurry. The laminate comprises a substrate and a carbon layer provided on the substrate, wherein the carbon layer comprises a diamond fine grain provided on the substrate and crushed by impact given thereto, a formation/growth inhibiting material that inhibits the formation of an impurity inhibiting the growth of a carbon grain and/or inhibits the growth of a carbon grain, and a carbon grain, and an amount (amount per unit volume) of the formation/growth inhibiting material decreases from a lower layer toward an upper layer on the substrate side. Preferably, the formation/growth inhibiting material is an SiO2 material or an Al2O3 material, and optionally an adhesiveness-reinforcing layer comprising titanium or a titanium alloy or the like may be provided between the substrate and the carbon layer.
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