发明申请
US20100092728A1 LAMINATE, AND POLISHING MATERIAL AND GRINDING MATERIAL USING THE SAME, AND METHOD FOR PRODUCING THE LAMINATE 失效
层压材料,抛光材料和使用其的研磨材料以及生产层压板的方法

LAMINATE, AND POLISHING MATERIAL AND GRINDING MATERIAL USING THE SAME, AND METHOD FOR PRODUCING THE LAMINATE
摘要:
The invention provides a laminate capable of polishing and grinding the surface of a material having a high hardness such as diamond, sapphire or hard carbon film, rapidly and in a simplified manner with high planarity and high accuracy, utilizing the high adhesiveness to substrates, the hardness and the surface planarity that a carbon film has, but using neither diamond abrasive grains nor alkali slurry. The laminate comprises a substrate and a carbon layer provided on the substrate, wherein the carbon layer comprises a diamond fine grain provided on the substrate and crushed by impact given thereto, a formation/growth inhibiting material that inhibits the formation of an impurity inhibiting the growth of a carbon grain and/or inhibits the growth of a carbon grain, and a carbon grain, and an amount (amount per unit volume) of the formation/growth inhibiting material decreases from a lower layer toward an upper layer on the substrate side. Preferably, the formation/growth inhibiting material is an SiO2 material or an Al2O3 material, and optionally an adhesiveness-reinforcing layer comprising titanium or a titanium alloy or the like may be provided between the substrate and the carbon layer.
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