摘要:
The invention provides a laminate capable of polishing and grinding the surface of a material having a high hardness such as diamond, sapphire or hard carbon film, rapidly and in a simplified manner with high planarity and high accuracy, utilizing the high adhesiveness to substrates, the hardness and the surface planarity that a carbon film has, but using neither diamond abrasive grains nor alkali slurry. The laminate comprises a substrate and a carbon layer provided on the substrate, wherein the carbon layer comprises a diamond fine grain provided on the substrate and crushed by impact given thereto, a formation/growth inhibiting material that inhibits the formation of an impurity inhibiting the growth of a carbon grain and/or inhibits the growth of a carbon grain, and a carbon grain, and an amount (amount per unit volume) of the formation/growth inhibiting material decreases from a lower layer toward an upper layer on the substrate side. Preferably, the formation/growth inhibiting material is an SiO2 material or an Al2O3 material, and optionally an adhesiveness-reinforcing layer comprising titanium or a titanium alloy or the like may be provided between the substrate and the carbon layer.
摘要翻译:本发明提供了一种能够以高平坦度和高精度快速且简单地抛光和研磨具有高硬度的材料的表面的层压体,利用对基材的高粘附性, 硬度和碳膜具有的表面平面度,但不使用金刚石磨粒或碱浆。 层压体包括基材和设置在基材上的碳层,其中碳层包括设置在基材上的金刚石细晶粒并通过冲击赋予其破碎,抑制形成抑制生长的杂质的形成/生长抑制材料 的碳粒子和/或抑制碳粒的生长和碳粒子,并且,生成/生长抑制材料的量(每单位体积的量)从基材侧的下层向上层减少。 优选地,形成/生长抑制材料是SiO 2材料或Al 2 O 3材料,并且可以在基材和碳层之间设置任选的包含钛或钛合金等的粘合性增强层。
摘要:
An object of the invention is to provide a resin material having further improved thermal conductivity, slidability, heat resistance, strength and rigidity of a resin material and having imparted thereto characteristics such as high thermal conductivity, rigidity, scratch prevention, high slidability and the like, and a method for producing the same. A laminate is obtained by laminating the resin material and a carbon film having a thermal conductivity of from 70 to 700 W/mK, a resistance value of 1×107 Ωcm or more (100° C.) and a film thickness of from 50 nm to 10 μm, the carbon film having a spectrum peak at a Brag's angle (2θ±0.3°) of from 41 to 42° in an X-ray diffraction spectrum by CuKα1 ray, or the laminate has a plasma-resistant film integrally molded on the resin material according to need. As a method for depositing a carbon film on the resin material, a method in which a reaction gas is used by mixing argon and/or hydrogen therewith, plasma is generated at a gas pressure of from 1 to 100 pascals, the substrate having provided thereon a plasma-resistant film is placed at a position that an electron temperature of plasma is from 0.5 to 3.0 eV, and radical species in the plasma are moved toward the substrate of the generation origin of the plasma such that the radical species almost uniformly reach on the surface of the substrate, is employed.
摘要:
An object of the invention is to provide a carbon film laminate having a sliding surface with low friction, low abrasion, and low counterpart aggressiveness using high adhesiveness to a base material, hardness, surface flatness, low counterpart aggressiveness, transparency, and high thermal conductivity which are provided to the carbon film without using liquid and semiliquid lubricants such as lubricating oil. Provided is a carbon film laminate including a base material, a carbon film adhesion reinforcing layer which is provided on the base material and which is formed from silicon oxide (SiOx, x=1 to 2) containing fluorine atoms (F) in a concentration of 1×1019 atoms/cm3 or more, and a carbon film that is formed on the carbon film adhesion reinforcing layer. The carbon film contains fluorine atoms in the film in a concentration of 1×1019 to 1×1021 atoms/cm3, and has an approximate spectrum curve obtained by superimposing, on a peak fitting curve A at a Bragg angle (2θ±0.5°) of 43.9° in an X-ray diffraction spectrum by CuKα1 rays, a peak fitting curve B at 41.7° and a baseline.
摘要:
ProblemTo provide a carbon film and a laminate having optical characteristics of retaining high transparency, having high refraction index and less double refractivity, being excellent in electric insulating property, being capable of being coated at good adhesion to various substrates, and being capable of being formed at a low temperature, and applications thereof.Means for Solving the ProblemThe invention relates to a carbon film which has an approximate spectrum curve obtainable by superimposing, on a peak fitting curve A at a Bragg's angle (2θ±0.3°) of 43.9°, a peak fitting curve B at 41.7° and a base line in an X-ray diffraction spectrum by a CuKa1 ray, and has a film thickness of from 2 mm to 100 μm. The intensity of the fitting curve B relative to the intensity of the fitting curve A is preferably from 5 to 90% in the approximated spectrum described above. In the carbon film, the Raman shift has a peak at a 1333±10 cm−1 in the Raman scattering spectrum, and the half-value width of the peak is from 10 to 40 cm−1. Further, the invention relates to a laminate characterized by disposing, on the substrate, a carbon aggregate film of 2 nm to 100 μm thickness comprising an aggregate of carbon particles having an approximate spectrum curve described above. Moreover, the invention relates to an optical device, optical glass, wrist watch, electronic circuit substrate, or grinding tool having the laminate described above.
摘要:
Small crystal size is the issue of a conventional method for formation of a film of graphene by a thermal CVD technique using a copper foil as a substrate. A carbon film laminate is described in which graphene having a larger crystal size is formed. The carbon film laminate is configured to include a sapphire single crystal having a surface composed of terrace surfaces which are flat at the atomic level, and atomic-layer steps, a copper single crystal thin film formed by epitaxial growth on the substrate, and graphene deposited on the copper single crystal thin film, and thus enabling formation of graphene having a large crystal size.
摘要:
The invention provides a laminate capable of polishing and grinding the surface of a material having a high hardness such as diamond, sapphire or hard carbon film, rapidly and in a simplified manner with high planarity and high accuracy, utilizing the high adhesiveness to substrates, the hardness and the surface planarity that a carbon film has, but using neither diamond abrasive grains nor alkali slurry. The laminate comprises a substrate and a carbon layer provided on the substrate, wherein the carbon layer comprises a diamond fine grain provided on the substrate and crushed by impact given thereto, a formation/growth inhibiting material that inhibits the formation of an impurity inhibiting the growth of a carbon grain and/or inhibits the growth of a carbon grain, and a carbon grain, and an amount (amount per unit volume) of the formation/growth inhibiting material decreases from a lower layer toward an upper layer on the substrate side. Preferably, the formation/growth inhibiting material is an SiO2 material or an Al2O3 material, and optionally an adhesiveness-reinforcing layer comprising titanium or a titanium alloy or the like may be provided between the substrate and the carbon layer.
摘要翻译:本发明提供了一种能够以高平坦度和高精度快速且简单地抛光和研磨具有高硬度的材料的表面的层压体,利用对基材的高粘附性, 硬度和碳膜具有的表面平面度,但不使用金刚石磨粒或碱浆。 层压体包括基材和设置在基材上的碳层,其中碳层包括设置在基材上的金刚石细晶粒并通过冲击赋予其破碎,抑制形成抑制生长的杂质的形成/生长抑制材料 的碳粒子和/或抑制碳粒的生长和碳粒子,并且,生成/生长抑制材料的量(每单位体积的量)从基材侧的下层向上层减少。 优选地,形成/生长抑制材料是SiO 2材料或Al 2 O 3材料,并且可以在基材和碳层之间设置任选的包含钛或钛合金等的粘合性增强层。
摘要:
An object of the present invention is to solve a problem such as a small crystal size, which is the issue of a conventional method for formation of a film of graphene by a thermal CVD technique using a copper foil as a substrate, and thus providing a carbon film laminate in which graphene having a larger crystal size is formed. The carbon film laminate is configured to include a sapphire (0001) single crystal having a surface composed of terrace surfaces which are flat at the atomic level, and atomic-layer steps, a copper (111) single crystal thin film formed by epitaxial growth on the substrate and graphene deposited on the copper (111) single crystal thin film, and thus enabling formation of graphene having a large crystal size.
摘要:
Disclosed is a carbon film which has optical characteristics of retaining a high transparency and being high in refractive index and low in double refractivity, is excellent in electric insulating performance, can be applied to various base materials with good adhesiveness, and can be formed at low temperature. Also disclosed is a laminate including a carbon film and a method for producing the laminate.
摘要:
Disclosed is a carbon film which has optical characteristics of retaining a high transparency and being high in refractive index and low in double refractivity, is excellent in electric insulating performance, can be applied to various base materials with good adhesiveness, and can be formed at low temperature. Also disclosed is a laminate including a carbon film and a method for producing the laminate.
摘要:
An object of the present invention is to solve problems such as high temperature processing and long processing time, which are issues of formation of a graphene film by thermal CVD, thereby providing a technique of forming a transparent conductive carbon film using a crystalline carbon film formed at lower temperature within a short time using a graphene film, and the method of the present invention is characterized by setting the temperature of a base material to 500° C. or lower and the pressure to 50 Pa or less, and also depositing a transparent conductive carbon film on a surface of a base material by a microwave surface-wave plasma CVD method in a gas atmosphere in which an oxidation inhibitor as an additive gas for suppressing oxidation of the surface of the base material is added to a carbon-containing gas or a mixed a carbon-containing gas and an inert gas.