发明申请
US20100097680A1 ILLUMINATION SYSTEM FOR OPTICAL INSPECTION 有权
光学检测用照明系统

ILLUMINATION SYSTEM FOR OPTICAL INSPECTION
摘要:
Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
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