发明申请
- 专利标题: ILLUMINATION SYSTEM FOR OPTICAL INSPECTION
- 专利标题(中): 光学检测用照明系统
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申请号: US12626592申请日: 2009-11-25
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公开(公告)号: US20100097680A1公开(公告)日: 2010-04-22
- 发明人: Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
- 申请人: Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
- 主分类号: G02B27/48
- IPC分类号: G02B27/48 ; G02B26/10
摘要:
Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
公开/授权文献
- US07924419B2 Illumination system for optical inspection 公开/授权日:2011-04-12
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