公开(公告)号：US07924419B2

公开(公告)日：2011-04-12

申请号：US12626592

申请日：2009-11-25

申请人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

发明人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

IPC分类号： G01N21/00

CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.

摘要翻译： 用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。 输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

公开(公告)号：US20110170090A1

公开(公告)日：2011-07-14

申请号：US13069332

申请日：2011-03-22

申请人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

发明人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.

摘要翻译： 用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。 输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

公开(公告)号：US20100097680A1

公开(公告)日：2010-04-22

申请号：US12626592

申请日：2009-11-25

申请人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

发明人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

IPC分类号： G02B27/48 ,  G02B26/10

CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.

摘要翻译： 用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。 输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

公开(公告)号：US08134699B2

公开(公告)日：2012-03-13

申请号：US13069332

申请日：2011-03-22

申请人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

发明人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

IPC分类号： G01N21/00

CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.

摘要翻译： 用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。 输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

公开(公告)号：US07630069B2

公开(公告)日：2009-12-08

申请号：US11394218

申请日：2006-01-23

申请人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

发明人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

IPC分类号： G01N21/00

CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.

摘要翻译： 用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。 输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

公开(公告)号：US20070008519A1

公开(公告)日：2007-01-11

申请号：US11394218

申请日：2006-01-23

申请人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

发明人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.

摘要翻译： 用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。 输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

公开(公告)号：US07030978B2

公开(公告)日：2006-04-18

申请号：US10423353

申请日：2003-04-25

申请人： Avishay Guetta ,  Haim Feldman ,  Ron Naftali ,  Doron Shoham

发明人： Avishay Guetta ,  Haim Feldman ,  Ron Naftali ,  Doron Shoham

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/8422 ,  G01N21/8806

摘要： A system and method for inspection of a substrate having a first refractive index, the method including the steps of: (i) defining an apodization scheme in response to a characteristic of the layer; (ii) applying an apodizer to apodize a beam of radiation in response to the apodization scheme; (iii) directing the apodized beam of radiation to impinge on the substrate, whereby a plurality of rays are reflected from the substrate; whereas the apodized beam of radiation propagates through an at least partially transparent medium having a third refractive index and an at least partially transparent layer having a second refractive index and is subsequently reflected from the substrate; whereas the second refractive index differs from the first refractive index and from the third refractive index; and (iv) detecting at least some of the plurality of reflected rays.

摘要翻译： 一种用于检查具有第一折射率的衬底的系统和方法，所述方法包括以下步骤：（i）响应于所述层的特性定义变迹方案; （ii）响应于变迹方案应用变迹器来变形辐射束; （iii）引导变迹的辐射束照射到衬底上，由此多个射线从衬底反射; 而变迹的辐射束通过具有第三折射率的至少部分透明的介质和具有第二折射率的至少部分透明的层传播，并随后从基底反射; 而第二折射率与第一折射率和第三折射率不同; 和（iv）检测所述多个反射光线中的至少一些。

公开(公告)号：US07339661B2

公开(公告)日：2008-03-04

申请号：US10511092

申请日：2003-09-08

申请人： Doron Korngut ,  Erez Admoni ,  Ofer Kadar ,  Lev Haikoviz ,  Haim Feldman ,  Avishay Guetta

发明人： Doron Korngut ,  Erez Admoni ,  Ofer Kadar ,  Lev Haikoviz ,  Haim Feldman ,  Avishay Guetta

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

摘要： Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.

摘要翻译： 用于检查样品的装置包括辐射源，其适于将光辐射引导到样品表面的区域上，以及多个图像传感器。 每个图像传感器被配置为将从该区域散射的辐射接收到不同的相应的角度范围中，以便形成该区域的相应图像。 图像处理器适于处理各个图像中的至少一个，以便检测表面上的缺陷。

公开(公告)号：US20050219518A1

公开(公告)日：2005-10-06

申请号：US10511092

申请日：2003-09-08

申请人： Doron Korngut ,  Erez Admoni ,  Ofer Kadar ,  Lev Haikoviz ,  Haim Feldman ,  Avishay Guetta

发明人： Doron Korngut ,  Erez Admoni ,  Ofer Kadar ,  Lev Haikoviz ,  Haim Feldman ,  Avishay Guetta

IPC分类号： G01N21/47 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G02B27/48

CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

摘要： Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.

摘要翻译： 用于检查样品的装置包括辐射源，其适于将光辐射引导到样品表面的区域上，以及多个图像传感器。 每个图像传感器被配置为将从该区域散射的辐射接收到不同的相应角度范围中，以便形成该区域的相应图像。 图像处理器适于处理各个图像中的至少一个，以便检测表面上的缺陷。

公开(公告)号：US20140299790A1

公开(公告)日：2014-10-09

申请号：US14009869

申请日：2011-04-07

申请人： Amir Shoham ,  Haim Feldman ,  Doron Shoham

发明人： Amir Shoham ,  Haim Feldman ,  Doron Shoham

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/33 ,  G01N2021/8822 ,  G01N2201/0697

摘要： A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.

摘要翻译： 具有斑点减少特性的方法和检查系统包括布置成产生输入光脉冲的光源和包括分束器的无漫射器散斑光学器件，用于将来自光源的输入光脉冲分成多个光脉冲， 在离开分束器时相对于彼此的角度定向，并且至少一个光学元件用于引导多个光脉冲以不同的角度撞击在被检查物体上。