发明申请
US20100111511A1 USE OF INFRARED CAMERA FOR REAL-TIME TEMPERATURE MONITORING AND CONTROL
有权
使用红外摄像机进行实时温度监测和控制
- 专利标题： USE OF INFRARED CAMERA FOR REAL-TIME TEMPERATURE MONITORING AND CONTROL
- 专利标题（中）： 使用红外摄像机进行实时温度监测和控制
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申请号： US12263349申请日： 2008-10-31
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公开(公告)号： US20100111511A1公开(公告)日： 2010-05-06
- 发明人: Nir Merry , Stephen Moffatt , Kailash Patalay , David Keith Carlson
- 申请人： Nir Merry , Stephen Moffatt , Kailash Patalay , David Keith Carlson
- 主分类号： F26B3/30
- IPC分类号： F26B3/30 ; F27D11/00
摘要：
Embodiments of the invention generally contemplate an apparatus and method for monitoring and controlling the temperature of a substrate during processing. One embodiment of the apparatus and method takes advantage of an infrared camera to obtain the temperature profile of multiple regions or the entire surface of the substrate and a system controller to calculate and coordinate in real time an optimized strategy for reducing any possible temperature non-uniformity found on the substrate during processing.
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