发明申请
- 专利标题: Vapor-Barrier Vacuum Isolation System
- 专利标题(中): 气体隔离真空隔离系统
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申请号: US12470689申请日: 2009-05-22
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公开(公告)号: US20100122901A1公开(公告)日: 2010-05-20
- 发明人: Leonard M. Weinstein , Karen M. Taminger
- 申请人: Leonard M. Weinstein , Karen M. Taminger
- 申请人地址: US DC Washington
- 专利权人: USA as represented by the Administrator of the National Aeronautics and Space Administration
- 当前专利权人: USA as represented by the Administrator of the National Aeronautics and Space Administration
- 当前专利权人地址: US DC Washington
- 主分类号: C23C14/34
- IPC分类号: C23C14/34
摘要:
A system includes a collimated beam source within a vacuum chamber, a condensable barrier gas, cooling material, a pump, and isolation chambers cooled by the cooling material to condense the barrier gas. Pressure levels of each isolation chamber are substantially greater than in the vacuum chamber. Coaxially-aligned orifices connect a working chamber, the isolation chambers, and the vacuum chamber. The pump evacuates uncondensed barrier gas. The barrier gas blocks entry of atmospheric vapor from the working chamber into the isolation chambers, and undergoes supersonic flow expansion upon entering each isolation chamber. A method includes connecting the isolation chambers to the vacuum chamber, directing vapor to a boundary with the working chamber, and supersonically expanding the vapor as it enters the isolation chambers via the orifices. The vapor condenses in each isolation chamber using the cooling material, and uncondensed vapor is pumped out of the isolation chambers via the pump.
公开/授权文献
- US08658004B2 Vapor-barrier vacuum isolation system 公开/授权日:2014-02-25
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