发明申请
US20100126407A1 SILICA GLASS CRUCIBLE AND METHOD FOR PULLING SINGLE-CRYSTAL SILICON
审中-公开
二氧化硅玻璃巧克力和拉伸单晶硅的方法
- 专利标题: SILICA GLASS CRUCIBLE AND METHOD FOR PULLING SINGLE-CRYSTAL SILICON
- 专利标题(中): 二氧化硅玻璃巧克力和拉伸单晶硅的方法
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申请号: US12694661申请日: 2010-01-27
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公开(公告)号: US20100126407A1公开(公告)日: 2010-05-27
- 发明人: Hiroshi Kishi , Masanori Fukui
- 申请人: Hiroshi Kishi , Masanori Fukui
- 申请人地址: JP Akita-ken JP Tokyo
- 专利权人: JAPAN SUPER QUARTZ CORPORATION,SUMCO CORPORATION
- 当前专利权人: JAPAN SUPER QUARTZ CORPORATION,SUMCO CORPORATION
- 当前专利权人地址: JP Akita-ken JP Tokyo
- 优先权: JP2006-096326 20060331
- 主分类号: C30B15/30
- IPC分类号: C30B15/30
摘要:
A silica glass crucible used for pulling single-crystal silicon, which includes a cylindrical straight body part, a bottom part and a curved part located between the straight body part and the bottom part, wherein the curvature radius of the inner wall surface of the curved part is 100 to 240 mm. Variation of the wall thickness W of the curved part is preferably 0.1 to 1.4 mm/cm.
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