发明申请
- 专利标题： ALUMINUM NITRIDE SINTERED PRODUCT, METHOD FOR PRODUCING THE SAME, AND ELECTROSTATIC CHUCK INCLUDING THE SAME
- 专利标题（中）： 氮化铝烧结产品，其制造方法和包括其的静电除尘器
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申请号： US12618901申请日： 2009-11-16
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公开(公告)号： US20100128409A1公开(公告)日： 2010-05-27
- 发明人: Naomi TERATANI , Toru Hayase , Yuji Katsuda
- 申请人： Naomi TERATANI , Toru Hayase , Yuji Katsuda
- 申请人地址： JP Nagoya-City
- 专利权人： NGK Insulators, Ltd.
- 当前专利权人： NGK Insulators, Ltd.
- 当前专利权人地址： JP Nagoya-City
- 优先权： JP2008-297438 20081121
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; B28B3/00 ; C04B35/582
摘要：
A method for producing an aluminum nitride sintered product according to the present invention includes the steps of (a) preparing a powder mixture that contains AlN, 2 to 10 parts by weight of Eu2O3 with respect to 100 parts by weight of AlN, Al2O3 such that a molar ratio of Al2O3 to Eu2O3 is 2 to 10, and TiO2 such that a molar ratio of TiO2 to Al2O3 is 0.05 to 1.2, but not Sm; (b) producing a compact from the powder mixture; and (c) firing the compact by subjecting the compact to hot-press firing in a vacuum or in an inert atmosphere.
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