摘要:
A method for producing an aluminum nitride sintered product according to the present invention includes the steps of (a) preparing a powder mixture that contains AlN, 2 to 10 parts by weight of Eu2O3 with respect to 100 parts by weight of AlN, Al2O3 such that a molar ratio of Al2O3 to Eu2O3 is 2 to 10, and TiO2 such that a molar ratio of TiO2 to Al2O3 is 0.05 to 1.2, but not Sm; (b) producing a compact from the powder mixture; and (c) firing the compact by subjecting the compact to hot-press firing in a vacuum or in an inert atmosphere.
摘要翻译:根据本发明的制造氮化铝烧结产品的方法包括以下步骤:(a)制备包含AlN的粉末混合物,相对于100重量份的AlN,Al 2 O 3为2至10重量份的Eu 2 O 3,使得 Al2O3与Eu2O3的摩尔比为2〜10,TiO 2与TiO 2的摩尔比为0.05〜1.2,而不是Sm; (b)从粉末混合物制备压块; 和(c)通过使压坯在真空或惰性气氛中热压烧结来烧结压块。
摘要:
A method for manufacturing an alumina sintered body of the present invention comprises: (a) forming a mixed powder containing at least Al2O3 and MgF2 or a mixed powder containing Al2O3, MgF2, and MgO into a compact having a predetermined shape; and (b) performing hot-press sintering of the compact in a vacuum atmosphere or a non-oxidizing atmosphere to form an alumina sintered body, in which when a amount of MgF2 to 100 parts by weight of Al2O3 is represented by X (parts by weight), and a hot-press sintering temperature is represented by Y (° C.), the hot-press sintering temperature is set to satisfy the following equations (1) to (4) 1,120≦Y≦1,300 (1) 0.15≦X≦1.89 (2) Y≦−78.7X+1,349 (3) Y≧−200X+1,212 (4).
摘要翻译:本发明的氧化铝烧结体的制造方法包括:(a)将至少包含Al 2 O 3和MgF 2的混合粉末或含有Al 2 O 3,MgF 2和MgO的混合粉末形成为具有预定形状的压块; 和(b)在真空气氛或非氧化性气氛中对压实体进行热压烧结,以形成氧化铝烧结体,其中当MgF2与100重量份的Al 2 O 3的量以X表示时 重量),热压烧结温度由Y(℃)表示,热压烧结温度设定为满足下述式(1)〜(4)1,120≦̸ Y≦̸ 1,300(1)0.15 ≦̸ X≦̸ 1.89(2)Y≦̸ -78.7X + 1,349(3)Y≥-200X + 1,212(4)。
摘要:
A method for producing an aluminum nitride sintered product according to the present invention includes the steps of (a) preparing a powder mixture that contains AlN, 2 to 10 parts by weight of Eu2O3 with respect to 100 parts by weight of AlN, Al2O3 such that a molar ratio of Al2O3 to Eu2O3 is 2 to 10, and TiO2 such that a molar ratio of TiO2 to Al2O3 is 0.05 to 1.2, but not Sm; (b) producing a compact from the powder mixture; and (c) firing the compact by subjecting the compact to hot-press firing in a vacuum or in an inert atmosphere.
摘要翻译:根据本发明的制造氮化铝烧结产品的方法包括以下步骤:(a)制备包含AlN的粉末混合物,相对于100重量份的AlN,Al 2 O 3为2至10重量份的Eu 2 O 3,使得 Al2O3与Eu2O3的摩尔比为2〜10,TiO 2与TiO 2的摩尔比为0.05〜1.2,而不是Sm; (b)从粉末混合物制备压块; 和(c)通过使压坯在真空或惰性气氛中热压烧结来烧结压块。
摘要:
A method for manufacturing an alumina sintered body of the present invention comprises: (a) forming a mixed powder containing at least Al2O3 and MgF2 or a mixed powder containing Al2O3, MgF2, and MgO into a compact having a predetermined shape; and (b) performing hot-press sintering of the compact in a vacuum atmosphere or a non-oxidizing atmosphere to form an alumina sintered body, in which when a amount of MgF2 to 100 parts by weight of Al2O3 is represented by X (parts by weight), and a hot-press sintering temperature is represented by Y (° C.), the hot-press sintering temperature is set to satisfy the following equations (1) to (4) 1,120≦Y≦1,300 (1) 0.15≦X≦1.89 (2) Y≦−78.7X+1,349 (3) Y≧−200X+1,212 (4).
摘要翻译:本发明的氧化铝烧结体的制造方法包括:(a)将至少包含Al 2 O 3和MgF 2的混合粉末或含有Al 2 O 3,MgF 2和MgO的混合粉末形成为具有预定形状的压块; 和(b)在真空气氛或非氧化性气氛中对压实体进行热压烧结,以形成氧化铝烧结体,其中当MgF2与100重量份的Al 2 O 3的量以X表示时 重量),热压烧结温度由Y(℃)表示,热压烧结温度设定为满足下述式(1)〜(4)1,120≦̸ Y≦̸ 1,300(1)0.15 ≦̸ X≦̸ 1.89(2)Y≦̸ -78.7X + 1,349(3)Y≥-200X + 1,212(4)。
摘要:
A novel aluminum nitride material having a low room temperature volume resistivity is provided. The aluminum nitride material has an aluminum nitride main component and includes at least 0.03 mol % of europium oxide. The aluminum nitride material has an aluminum nitride phase and an europium-aluminum composite oxide phase. An aluminum nitride material also provided having an aluminum nitride main component, wherein a total content of europium oxide and samarium oxide is at least 0.09 mol %. The aluminum nitride material has an aluminum nitride phase and a composite oxide phase containing at least europium and aluminum.
摘要:
An electrostatic chuck is provided with a ceramic substrate 12 in which an electrode 14 is embedded, an electrode terminal 14a exposed at the bottom of a concave portion 16 disposed on the back surface of the ceramic substrate 12, a power feed member 20 to supply an electric power to the electrode 14, and a joining layer 22 to connect this power feed member 20 to the ceramic substrate 12. The joining layer 22 is formed by using a AuGe based alloy, a AuSn based alloy, or a AuSi based alloy. The ceramic substrate 12 and the power feed member 20 are selected in such a way that the thermal expansion coefficient difference D calculated by subtracting the thermal expansion coefficient of the ceramic substrate 12 from the thermal expansion coefficient of the power feed member 20 satisfies −2.2≦D≦6 (unit: ppm/K).
摘要:
An electrostatic chuck is provided with a ceramic substrate 12 in which an electrode 14 is embedded, an electrode terminal 14a exposed at the bottom of a concave portion 16 disposed on the back surface of the ceramic substrate 12, a power feed member 20 to supply an electric power to the electrode 14, and a joining layer 22 to connect this power feed member 20 to the ceramic substrate 12. The joining layer 22 is formed by using a AuGe based alloy, a AuSn based alloy, or a AuSi based alloy. The ceramic substrate 12 and the power feed member 20 are selected in such a way that the thermal expansion coefficient difference D calculated by subtracting the thermal expansion coefficient of the ceramic substrate 12 from the thermal expansion coefficient of the power feed member 20 satisfies −2.2≦D≦6 (unit: ppm/K).
摘要:
A fixing device for thermally fixing an unfixed image onto a recording sheet by causing the sheet to pass through a fixing nip. The fixing device includes: heat belt formed in an endless shape and provided with a resistance heat layer; first pressure member provided inside a running path of the heat belt; and second pressure member pressing the first pressure member from over the running path to form the fixing nip. At least one of the first and second pressure members is rotating body. The heat belt has a pressure-receiving area and two non-pressure areas. The pressure-receiving area receives pressures from both the first and second pressure members. The non-pressure areas have been arranged at outside of the pressure-receiving area in an axis direction of the rotating body. Two ring-like electrodes have been formed on circumferential surfaces of the non-pressure areas and are used to supply power to the resistance heat layer.
摘要:
Disclosed is a fixing device for thermally fixing an unfixed image onto the recording sheet, the fixing device comprising: a fixing belt; and a meander regulation member provided adjacent to an edge of the fixing belt in a width direction thereof, and operable to prevent meandering of the fixing belt, wherein the fixing belt includes: a resistive heat layer that is tubular and generates heat when an electric current is applied thereto; and first and second electrodes that are provided circumferentially on an outer circumferential surface of the resistive heat layer, and that receive and apply the electric current to the resistive heat layer, and the first electrode is provided closer to the meander regulation member than to the second electrode, and is at a distance from the edge of the fixing belt in the width direction thereof.
摘要:
A fixing device for thermally fixing an unfixed image formed on a recording sheet by passing the recording sheet through a fixing nip. The fixing device has a heat-generating endless belt that includes: a resistive heat layer that generates heat upon receiving electric current; and a pair of electrode layers each disposed along a different one of widthwise edges of the heat-generating endless belt. The resistive heat layer has (i) reduced thickness portions each along a widthwise edge thereof and (ii) a middle portion between the reduced thickness portions. Each reduced thickness portion is thinner than the middle portion and connected to the middle portion with a wall surface upright in a direction perpendicular to the rotation axis of the heat-generating endless belt to define a stair shape. Each electrode layer is disposed on the resistive heat layer to be in contact with a corresponding one of the wall surfaces.