Member for semiconductor manufacturing apparatus
    6.
    发明授权
    Member for semiconductor manufacturing apparatus 有权
    半导体制造设备会员

    公开(公告)号:US08908349B2

    公开(公告)日:2014-12-09

    申请号:US13420810

    申请日:2012-03-15

    IPC分类号: H02N13/00 H01L21/683

    CPC分类号: H01L21/6833

    摘要: An electrostatic chuck is provided with a ceramic substrate 12 in which an electrode 14 is embedded, an electrode terminal 14a exposed at the bottom of a concave portion 16 disposed on the back surface of the ceramic substrate 12, a power feed member 20 to supply an electric power to the electrode 14, and a joining layer 22 to connect this power feed member 20 to the ceramic substrate 12. The joining layer 22 is formed by using a AuGe based alloy, a AuSn based alloy, or a AuSi based alloy. The ceramic substrate 12 and the power feed member 20 are selected in such a way that the thermal expansion coefficient difference D calculated by subtracting the thermal expansion coefficient of the ceramic substrate 12 from the thermal expansion coefficient of the power feed member 20 satisfies −2.2≦D≦6 (unit: ppm/K).

    摘要翻译: 静电吸盘设置有嵌入电极14的陶瓷基板12,暴露在设置在陶瓷基板12的背面的凹部16的底部的电极端子14a,供电部件20 电极14的电力,以及将该供电部件20连接到陶瓷基板12的接合层22.接合层22通过使用AuGe系合金,AuSn系合金或AuSi系合金形成。 选择陶瓷基板12和供电部件20,使得通过从供电部件20的热膨胀系数减去陶瓷基板12的热膨胀系数而计算的热膨胀系数差D满足-2.2< ; D≦̸ 6(单位:ppm / K)。

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    7.
    发明申请
    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS 有权
    半导体制造设备会员

    公开(公告)号:US20120250211A1

    公开(公告)日:2012-10-04

    申请号:US13420810

    申请日:2012-03-15

    IPC分类号: H01L21/683

    CPC分类号: H01L21/6833

    摘要: An electrostatic chuck is provided with a ceramic substrate 12 in which an electrode 14 is embedded, an electrode terminal 14a exposed at the bottom of a concave portion 16 disposed on the back surface of the ceramic substrate 12, a power feed member 20 to supply an electric power to the electrode 14, and a joining layer 22 to connect this power feed member 20 to the ceramic substrate 12. The joining layer 22 is formed by using a AuGe based alloy, a AuSn based alloy, or a AuSi based alloy. The ceramic substrate 12 and the power feed member 20 are selected in such a way that the thermal expansion coefficient difference D calculated by subtracting the thermal expansion coefficient of the ceramic substrate 12 from the thermal expansion coefficient of the power feed member 20 satisfies −2.2≦D≦6 (unit: ppm/K).

    摘要翻译: 静电吸盘设置有嵌入电极14的陶瓷基板12,暴露在设置在陶瓷基板12的背面的凹部16的底部的电极端子14a,供电部件20 电极14的电力,以及将该供电部件20连接到陶瓷基板12的接合层22.接合层22通过使用AuGe系合金,AuSn系合金或AuSi系合金形成。 选择陶瓷基板12和供电部件20,使得通过从供电部件20的热膨胀系数减去陶瓷基板12的热膨胀系数而计算的热膨胀系数差D满足-2.2< ; D≦̸ 6(单位:ppm / K)。

    Fixing device and image forming apparatus
    8.
    发明授权
    Fixing device and image forming apparatus 有权
    固定装置和成像装置

    公开(公告)号:US08781378B2

    公开(公告)日:2014-07-15

    申请号:US13112346

    申请日:2011-05-20

    IPC分类号: G03G15/20

    摘要: A fixing device for thermally fixing an unfixed image onto a recording sheet by causing the sheet to pass through a fixing nip. The fixing device includes: heat belt formed in an endless shape and provided with a resistance heat layer; first pressure member provided inside a running path of the heat belt; and second pressure member pressing the first pressure member from over the running path to form the fixing nip. At least one of the first and second pressure members is rotating body. The heat belt has a pressure-receiving area and two non-pressure areas. The pressure-receiving area receives pressures from both the first and second pressure members. The non-pressure areas have been arranged at outside of the pressure-receiving area in an axis direction of the rotating body. Two ring-like electrodes have been formed on circumferential surfaces of the non-pressure areas and are used to supply power to the resistance heat layer.

    摘要翻译: 一种用于通过使片材通过定影辊隙将未定影图像热定影到记录片材上的定影装置。 定影装置包括:加热带,其形成为环形,并设有电阻加热层; 第一压力构件设置在加热带的行进路径内; 以及第二压力部件,从所述行进路径的上方按压所述第一压力部件,以形成所述定影辊隙。 第一和第二压力构件中的至少一个是旋转体。 加热带具有受压面积和两个非压力区域。 压力接收区域接收来自第一和第二压力构件的压力。 非压力区域设置在受压区域的旋转体的轴线方向的外侧。 在非压力区域的圆周表面上形成有两个环形电极,用于向电阻加热层供电。

    Fixing device and image forming apparatus
    9.
    发明授权
    Fixing device and image forming apparatus 有权
    固定装置和成像装置

    公开(公告)号:US08606163B2

    公开(公告)日:2013-12-10

    申请号:US13113719

    申请日:2011-05-23

    IPC分类号: G03G15/00 G03G15/20

    摘要: Disclosed is a fixing device for thermally fixing an unfixed image onto the recording sheet, the fixing device comprising: a fixing belt; and a meander regulation member provided adjacent to an edge of the fixing belt in a width direction thereof, and operable to prevent meandering of the fixing belt, wherein the fixing belt includes: a resistive heat layer that is tubular and generates heat when an electric current is applied thereto; and first and second electrodes that are provided circumferentially on an outer circumferential surface of the resistive heat layer, and that receive and apply the electric current to the resistive heat layer, and the first electrode is provided closer to the meander regulation member than to the second electrode, and is at a distance from the edge of the fixing belt in the width direction thereof.

    摘要翻译: 公开了一种用于将未定影图像热定影到记录片材上的定影装置,该定影装置包括:定影带; 以及在宽度方向上与定影带的边缘相邻设置的弯曲调节构件,并且可操作以防止定影带的曲折,其中定影带包括:电阻加热层,其为管状并且当电流 适用于 以及在电阻性热层的外周面周向设置并且将电流接收并施加到电阻加热层的第一和第二电极,并且第一电极设置成比第二电极更靠近曲折调节构件 并且在定影带的边缘的宽度方向上有一段距离。

    FIXING DEVICE AND IMAGE FORMING APPARATUS
    10.
    发明申请
    FIXING DEVICE AND IMAGE FORMING APPARATUS 有权
    固定装置和图像形成装置

    公开(公告)号:US20110299902A1

    公开(公告)日:2011-12-08

    申请号:US13112344

    申请日:2011-05-20

    IPC分类号: G03G15/20

    CPC分类号: G03G15/2053 G03G2215/2025

    摘要: A fixing device for thermally fixing an unfixed image formed on a recording sheet by passing the recording sheet through a fixing nip. The fixing device has a heat-generating endless belt that includes: a resistive heat layer that generates heat upon receiving electric current; and a pair of electrode layers each disposed along a different one of widthwise edges of the heat-generating endless belt. The resistive heat layer has (i) reduced thickness portions each along a widthwise edge thereof and (ii) a middle portion between the reduced thickness portions. Each reduced thickness portion is thinner than the middle portion and connected to the middle portion with a wall surface upright in a direction perpendicular to the rotation axis of the heat-generating endless belt to define a stair shape. Each electrode layer is disposed on the resistive heat layer to be in contact with a corresponding one of the wall surfaces.

    摘要翻译: 一种定影装置,用于通过使记录纸通过定影辊隙来热定影在记录纸上形成的未定影图像。 定影装置具有发热环形带,其包括:电阻热层,其在接收电流时产生热量; 以及一对电极层,每个电极层沿着发热环形带的宽度方向边缘的不同的一个边缘设置。 电阻加热层具有(i)沿着其宽度方向的边缘各自减小厚度部分,以及(ii)缩小厚度部分之间的中间部分。 每个厚度减小的部分比中间部分薄,并连接到中间部分,壁面在垂直于发热环形带的旋转轴线的方向上竖立,以限定楼梯形状。 每个电极层设置在电阻加热层上以与对应的一个壁表面接触。