发明申请
- 专利标题: Methods of Fabricating Electromechanical Non-Volatile Memory Devices
- 专利标题(中): 制造机电非易失性存储器件的方法
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申请号: US12693783申请日: 2010-01-26
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公开(公告)号: US20100129976A1公开(公告)日: 2010-05-27
- 发明人: Eun Jung Yun , Sung-Young Lee , Min-Sang Kim , Sung-Min Kim
- 申请人: Eun Jung Yun , Sung-Young Lee , Min-Sang Kim , Sung-Min Kim
- 优先权: KR2006-102696 20061023
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
Electromechanical non-volatile memory devices are provided including a semiconductor substrate having an upper surface including insulation characteristics. A first electrode pattern is provided on the semiconductor substrate. The first electrode pattern exposes portions of a surface of the semiconductor substrate therethrough. A conformal bit line is provided on the first electrode pattern and the exposed surface of semiconductor substrate. The bit line is spaced apart from a sidewall of the first electrode pattern and includes a conductive material having an elasticity generated by a voltage difference. An insulating layer pattern is provided on an upper surface of the bit line located on the semiconductor substrate. A second electrode pattern is spaced apart from the bit line and provided on the insulating layer pattern. The second electrode pattern faces the first electrode pattern. Related methods are also provided.
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