发明申请
- 专利标题: PHASE CHANGE MEMORY
- 专利标题(中): 相变记忆
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申请号: US12325801申请日: 2008-12-01
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公开(公告)号: US20100133503A1公开(公告)日: 2010-06-03
- 发明人: Chien-Li Kuo , Yung-Chang Lin , Kuei-Sheng Wu , Chien-Hsien Chen
- 申请人: Chien-Li Kuo , Yung-Chang Lin , Kuei-Sheng Wu , Chien-Hsien Chen
- 申请人地址: TW Hsinchu
- 专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L45/00
- IPC分类号: H01L45/00 ; G11C11/00
摘要:
A phase change memory is provided, which includes a semiconductor substrate having a first conductive type, buried word lines having a second conductive type, doped semiconductor layers having the first conductive type, memory cells, metal silicide layers, and bit lines. The buried word lines are disposed in the semiconductor substrate. Each buried word line includes a line-shaped main portion extended along a first direction and protrusion portions. Each protrusion portion is connected to one long side of the line-shaped main portion. Each doped semiconductor layer is disposed on one protrusion portion. Each memory cell includes a phase change material layer and is disposed on and electrically connected to one of the doped semiconductor layers. Each metal silicide layer is disposed on one of the line-shaped main portions. Each bit line is connected to memory cells disposed on the word lines in a second direction substantially perpendicular to the first direction.
公开/授权文献
- US08035097B2 Phase change memory 公开/授权日:2011-10-11
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