发明申请
- 专利标题: BROAD-RANGE MAGNETIC SENSOR AND MANUFACTURING PROCESS THEREOF
- 专利标题(中): 广域范围磁传感器及其制造工艺
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申请号: US12628448申请日: 2009-12-01
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公开(公告)号: US20100134101A1公开(公告)日: 2010-06-03
- 发明人: CATERINA RIVA , Marco Morelli , Marco Marchesi
- 申请人: CATERINA RIVA , Marco Morelli , Marco Marchesi
- 申请人地址: IT Agrate Brianza (mi)
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT Agrate Brianza (mi)
- 优先权: ITTO2008A000897 20081203
- 主分类号: G01R33/06
- IPC分类号: G01R33/06
摘要:
A magnetic sensor is formed by a fluxgate sensor and by at least one Hall sensor integrated in a same integrated device, wherein the magnetic core of the fluxgate sensor is formed by a magnetic region that operates also as a concentrator for the Hall sensor. The magnetic region is manufactured in a post-machining stage on the metallization layers wherein the energizing coil and sensing coil of the fluxgate sensor are formed; the energizing and sensing coils are formed on a semiconductor substrate housing the conductive regions of the Hall sensor.
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