发明申请
US20100134101A1 BROAD-RANGE MAGNETIC SENSOR AND MANUFACTURING PROCESS THEREOF 审中-公开
广域范围磁传感器及其制造工艺

BROAD-RANGE MAGNETIC SENSOR AND MANUFACTURING PROCESS THEREOF
摘要:
A magnetic sensor is formed by a fluxgate sensor and by at least one Hall sensor integrated in a same integrated device, wherein the magnetic core of the fluxgate sensor is formed by a magnetic region that operates also as a concentrator for the Hall sensor. The magnetic region is manufactured in a post-machining stage on the metallization layers wherein the energizing coil and sensing coil of the fluxgate sensor are formed; the energizing and sensing coils are formed on a semiconductor substrate housing the conductive regions of the Hall sensor.
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