BROAD-RANGE MAGNETIC SENSOR AND MANUFACTURING PROCESS THEREOF
    1.
    发明申请
    BROAD-RANGE MAGNETIC SENSOR AND MANUFACTURING PROCESS THEREOF 审中-公开
    广域范围磁传感器及其制造工艺

    公开(公告)号:US20100134101A1

    公开(公告)日:2010-06-03

    申请号:US12628448

    申请日:2009-12-01

    IPC分类号: G01R33/06

    CPC分类号: G01R33/05 G01R33/07

    摘要: A magnetic sensor is formed by a fluxgate sensor and by at least one Hall sensor integrated in a same integrated device, wherein the magnetic core of the fluxgate sensor is formed by a magnetic region that operates also as a concentrator for the Hall sensor. The magnetic region is manufactured in a post-machining stage on the metallization layers wherein the energizing coil and sensing coil of the fluxgate sensor are formed; the energizing and sensing coils are formed on a semiconductor substrate housing the conductive regions of the Hall sensor.

    摘要翻译: 磁传感器由磁通门传感器和集成在同一集成器件中的至少一个霍尔传感器形成,其中磁通门传感器的磁芯由还用作霍尔传感器的集中器的磁区形成。 在金属化层的后加工阶段制造磁性区域,其中形成磁通门传感器的激励线圈和感测线圈; 激励和感测线圈形成在容纳霍尔传感器的导电区域的半导体衬底上。

    Electrostatic micromotor with stator and rotor in contact, in particular for probe-storage systems
    2.
    发明授权
    Electrostatic micromotor with stator and rotor in contact, in particular for probe-storage systems 有权
    静电微电机与定子和转子接触,特别是探针存储系统

    公开(公告)号:US08466599B2

    公开(公告)日:2013-06-18

    申请号:US12533850

    申请日:2009-07-31

    IPC分类号: H02N1/00

    CPC分类号: H02N1/004

    摘要: In an electrostatic micromotor, a mobile substrate faces a fixed substrate and is suspended over the fixed substrate at a given distance of separation in an operative resting condition; an actuation unit is configured so as to give rise to a relative movement of the mobile substrate with respect to the fixed substrate in a direction of movement during an operative condition of actuation. The actuation unit is also configured so as to bring the mobile substrate and the fixed substrate substantially into contact and to keep them in contact during the operative condition of actuation. The electrostatic micromotor is provided with an electronic unit for reducing friction, configured so as to reduce a friction generated by the contact between the rotor substrate and the stator substrate during the relative movement.

    摘要翻译: 在静电微电机中,移动基板面向固定的基板并且在操作的静止状态下以给定的分离距离悬挂在固定的基板上; 致动单元被构造成在致动的操作状态期间在移动方向上相对于固定基板产生相对移动。 致动单元还构造成使得移动基板和固定基板在操作的操作状态下基本接触并保持它们接触。 静电微电机设置有用于减少摩擦的电子单元,其被配置为在相对运动期间减小由转子基板和定子基板之间的接触产生的摩擦。

    ELECTROSTATIC MICROMOTOR WITH STATOR AND ROTOR IN CONTACT, IN PARTICULAR FOR PROBE-STORAGE SYSTEMS
    3.
    发明申请
    ELECTROSTATIC MICROMOTOR WITH STATOR AND ROTOR IN CONTACT, IN PARTICULAR FOR PROBE-STORAGE SYSTEMS 有权
    具有定子和转子接触的静电微型电动机,特别是探针存储系统

    公开(公告)号:US20100026138A1

    公开(公告)日:2010-02-04

    申请号:US12533850

    申请日:2009-07-31

    IPC分类号: H02N11/00

    CPC分类号: H02N1/004

    摘要: In an electrostatic micromotor, a mobile substrate faces a fixed substrate and is suspended over the fixed substrate at a given distance of separation in an operative resting condition; an actuation unit is configured so as to give rise to a relative movement of the mobile substrate with respect to the fixed substrate in a direction of movement during an operative condition of actuation. The actuation unit is also configured so as to bring the mobile substrate and the fixed substrate substantially into contact and to keep them in contact during the operative condition of actuation. The electrostatic micromotor is provided with an electronic unit for reducing friction, configured so as to reduce a friction generated by the contact between the rotor substrate and the stator substrate during the relative movement.

    摘要翻译: 在静电微电机中,移动基板面向固定的基板并且在操作的静止状态下以给定的分离距离悬挂在固定的基板上; 致动单元被构造成在致动的操作状态期间在移动方向上相对于固定基板产生相对移动。 致动单元还构造成使得移动基板和固定基板在操作的操作状态下基本接触并保持它们接触。 静电微电机设置有用于减少摩擦的电子单元,其被配置为在相对运动期间减小由转子基板和定子基板之间的接触产生的摩擦。