发明申请
- 专利标题: GAS DISTRIBUTION BLOCKER APPARATUS
- 专利标题(中): 气体分配阻塞装置
-
申请号: US12627578申请日: 2009-11-30
-
公开(公告)号: US20100136216A1公开(公告)日: 2010-06-03
- 发明人: Lun Tsuei , Alan Tso , Tom K. Cho , Brian Sy-Yuan Shieh
- 申请人: Lun Tsuei , Alan Tso , Tom K. Cho , Brian Sy-Yuan Shieh
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: C23C16/52
- IPC分类号: C23C16/52 ; C23C16/00
摘要:
Embodiments of the present invention generally provide apparatus and methods for altering the flow and pressure differential of process gases supplied across a showerhead of a processing chamber to provide improved deposition uniformity across the surface of a substrate disposed therein. In one embodiment, a blocker plate is disposed between a backing plate and a showerhead. In one embodiment, the distance between the blocker plate and the showerhead is adjustable. In another embodiment, the blocker plate has a non-planar surface contour. In another embodiment, a regional blocker plate is disposed between a backing plate and a showerhead. In another embodiment, a central blocker plate and a peripheral blocker plate are disposed between a backing plate and a showerhead.
公开/授权文献
- US09714465B2 Gas distribution blocker apparatus 公开/授权日:2017-07-25