发明申请
US20100140066A1 VERY LOW VOLTAGE, ULTRAFAST NANOELECTROMECHANICAL SWITCHES AND RESONANT SWITCHES
有权
非常低电压，超高频纳米电子开关和谐波开关
- 专利标题： VERY LOW VOLTAGE, ULTRAFAST NANOELECTROMECHANICAL SWITCHES AND RESONANT SWITCHES
- 专利标题（中）： 非常低电压，超高频纳米电子开关和谐波开关
-
申请号： US12546485申请日： 2009-08-24
-
公开(公告)号： US20100140066A1公开(公告)日： 2010-06-10
- 发明人: Philip Xiaoli Feng , Matthew Matheny , Rassul Karbalin , Michael L. Roukes
- 申请人： Philip Xiaoli Feng , Matthew Matheny , Rassul Karbalin , Michael L. Roukes
- 申请人地址： US CA Pasadena
- 专利权人： California Institute of Technology
- 当前专利权人： California Institute of Technology
- 当前专利权人地址： US CA Pasadena
- 主分类号： H01H59/00
- IPC分类号： H01H59/00
摘要：
The invention provides lateral nanoelectromechanical switches useful for integration into circuitry fabricated using standard semiconductor processing methods, or using techniques compatible with the mainstream semiconductor processing technologies. Methods of fabricating the switches are described. Some exemplary designs for two and three terminal switches are provided. Descriptions of structural features and the operating parameters for some exemplary switches are given. The switches are expected to be compatible with circuitry that is operable in computer-based systems.
公开/授权文献
信息查询
