Provided is a microfluidic device. The microfluidic device includes a sample storage chamber storing sample fluid therein, a detection chamber connected to the sample storage chamber and detecting a specific material of the sample fluid, a cleaning liquid storage chamber connected to the detection chamber and storing cleaning liquid therein, a plurality of fluid passages interconnecting the chambers, and a micropump transferring the cleaning liquid. The microfluidic device precisely inspects a sample fluid although a small amount of the sample fluid flows.