发明申请
- 专利标题: Predicting Wafer Failure Using Learned Probability
- 专利标题(中): 使用学习概率预测晶圆失效
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申请号: US12329868申请日: 2008-12-08
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公开(公告)号: US20100145646A1公开(公告)日: 2010-06-10
- 发明人: Robert Jeffrey Baseman , Susan G. Conti , William A. Muth , Michal Rosen-Zvi , Frederick A. Scholl
- 申请人: Robert Jeffrey Baseman , Susan G. Conti , William A. Muth , Michal Rosen-Zvi , Frederick A. Scholl
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
Techniques for estimating a quality of one or more wafers are presented. One or more first wafers comprising one or more first dies are tested. A probability of wafer failure is determined in accordance with one or more first test measurements of the one or more first dies. A pass status and/or a fail status of one or more second wafers is inferred by testing a select one or more second dies of the one or more second wafers and evaluating one or more second test measurements of the select one or more second dies in accordance with the determined probability of wafer failure.
公开/授权文献
- US07962302B2 Predicting wafer failure using learned probability 公开/授权日:2011-06-14
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