发明申请
US20100145646A1 Predicting Wafer Failure Using Learned Probability 有权
使用学习概率预测晶圆失效

Predicting Wafer Failure Using Learned Probability
摘要:
Techniques for estimating a quality of one or more wafers are presented. One or more first wafers comprising one or more first dies are tested. A probability of wafer failure is determined in accordance with one or more first test measurements of the one or more first dies. A pass status and/or a fail status of one or more second wafers is inferred by testing a select one or more second dies of the one or more second wafers and evaluating one or more second test measurements of the select one or more second dies in accordance with the determined probability of wafer failure.
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