发明申请
- 专利标题: Nodular Silica Sol and Method of Producing the Same
- 专利标题(中): 球状二氧化硅溶胶及其制备方法
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申请号: US11990111申请日: 2006-08-01
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公开(公告)号: US20100146864A1公开(公告)日: 2010-06-17
- 发明人: Kazuhiro Nakayama , Akira Nakashima , Hiroyasu Nishida , Yoshinori Wakamiya
- 申请人: Kazuhiro Nakayama , Akira Nakashima , Hiroyasu Nishida , Yoshinori Wakamiya
- 申请人地址: JP Kawasaki-shi
- 专利权人: Catalysts & Chemicals Industries Co., Ltd
- 当前专利权人: Catalysts & Chemicals Industries Co., Ltd
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2005-231465 20050810; JP2005-254054 20050901
- 国际申请: PCT/JP2006/315181 WO 20060801
- 主分类号: C01B33/146
- IPC分类号: C01B33/146 ; C09K3/14
摘要:
A novel nodular silica sol adapted to use as a polishing material for polishing, for instance, CMP.The nodular silica sol has a ratio of an average particle diameter (r) measured by the dynamic light scattering method versus a particle diameter (r′) converted to that of an equivalent sphere computed from an average specific surface area measured by means of the nitrogen absorption method (r/r′, referred to as “association ratio”) in a range from 1.2 to 10, the particle diameter (r′) in a range from 5 to 200 nm, and the specific surface area in a range from 13 to 550 m2/g. The nodular silica particles have heterogeneous forms, and contents of Ca and Mg contained in the nodular silica particles are below 1000 ppm against SiO2 respectively.
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