Invention Application
- Patent Title: GAS SENSOR
- Patent Title (中): 气体传感器
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Application No.: US12527824Application Date: 2008-12-12
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Publication No.: US20100147685A1Publication Date: 2010-06-17
- Inventor: Koichi Ikawa , Masahito Kida , Shinichiro Kito , Yoshinori Tsujimura , Takio Kojima
- Applicant: Koichi Ikawa , Masahito Kida , Shinichiro Kito , Yoshinori Tsujimura , Takio Kojima
- Applicant Address: JP Nagoya-shi, Aichi
- Assignee: NGK Spark Plug Co. Ltd
- Current Assignee: NGK Spark Plug Co. Ltd
- Current Assignee Address: JP Nagoya-shi, Aichi
- Priority: JP2007-323238 20071214
- International Application: PCT/JP2008/072709 WO 20081212
- Main IPC: G01N27/26
- IPC: G01N27/26

Abstract:
Between a gas sensing layer (4) and a base member (15) composed of a silicon substrate (2) and an insulating coat layer (3), there is formed an adhesion layer 7, to improve the adhesion therebetween, and to prevent separation. The gas sensing layer (4) and sensing electrodes (6) are electrically connected by abutment of a confronting surface (61) of sensing electrodes (6) confronting the gas sensing layer (4) and sides surfaces of the sensing electrodes on both sides, on the gas sensing layer (4), and accordingly the gas sensor properly senses an electric characteristic of the gas sensing layer (4) varied in accordance with a concentration variation of a specified gas. Furthermore, the sensing electrodes (6) are in contact with the gas sensing layer (4), but the sensing electrodes are not in contact with the adhesion layer (7). Therefore, the adhesion layer (7) need not be a complete insulating layer, and it is possible to use, as the adhesion layer, an incomplete insulating film or a conductive film, so that options of the adhesion layer (7) are increased.
Public/Granted literature
- US08393196B2 Gas sensor Public/Granted day:2013-03-12
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