发明申请
US20100148095A1 STAMPER, STAMPER TESTING METHOD, AND STAMPER TESTING APPARATUS
审中-公开
冲压器，冲压器测试方法和冲压器测试装置
- 专利标题： STAMPER, STAMPER TESTING METHOD, AND STAMPER TESTING APPARATUS
- 专利标题（中）： 冲压器，冲压器测试方法和冲压器测试装置
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申请号： US12538638申请日： 2009-08-10
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公开(公告)号： US20100148095A1公开(公告)日： 2010-06-17
- 发明人: Kazuyo Umezawa , Seiji Morita , Masatoshi Sakurai
- 申请人： Kazuyo Umezawa , Seiji Morita , Masatoshi Sakurai
- 申请人地址： JP Tokyo
- 专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2008-317008 20081212
- 主分类号： H01L33/00
- IPC分类号： H01L33/00 ; B29C35/08
摘要：
According to one embodiment, a stamper has a data area and servo area, and has concentric or spiral grooves formed in the data area. Phases αE and αH at which differential signal levels of the E- and H-polarized light are maximum when the data area is irradiated with a laser beam have a relationship represented by (αE+αH)≦270°