发明申请
- 专利标题: GRAIN GROWTH PROMOTION LAYER FOR SEMICONDUCTOR INTERCONNECT STRUCTURES
- 专利标题(中): 用于半导体互连结构的颗粒生长促进层
-
申请号: US12709928申请日: 2010-02-22
-
公开(公告)号: US20100148366A1公开(公告)日: 2010-06-17
- 发明人: Chih-Chao Yang , Shom Ponoth
- 申请人: Chih-Chao Yang , Shom Ponoth
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
An interconnect structure of the single or dual damascene type and a method of forming the same, which substantially reduces the electromigration problem that is exhibited by prior art interconnect structures, are provided. In accordance with the present invention, a grain growth promotion layer, which promotes the formation of a conductive region within the interconnect structure that has a bamboo microstructure and an average grain size of larger than 0.05 microns is utilized. The inventive structure has improved performance and reliability.
公开/授权文献
信息查询
IPC分类: