发明申请
US20100151383A1 POLYMER COMPOUND, PHOTORESIST COMPOSITION CONTAINING SUCH POLYMER COMPOUND, AND METHOD FOR FORMING RESIST PATTERN
有权
聚合物化合物,包含这种聚合物化合物的光电组合物和形成耐蚀图案的方法
- 专利标题: POLYMER COMPOUND, PHOTORESIST COMPOSITION CONTAINING SUCH POLYMER COMPOUND, AND METHOD FOR FORMING RESIST PATTERN
- 专利标题(中): 聚合物化合物,包含这种聚合物化合物的光电组合物和形成耐蚀图案的方法
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申请号: US12707462申请日: 2010-02-17
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公开(公告)号: US20100151383A1公开(公告)日: 2010-06-17
- 发明人: Toshiyuki Ogata , Syogo Matsumaru , Hideo Hada , Masaaki Yoshida
- 申请人: Toshiyuki Ogata , Syogo Matsumaru , Hideo Hada , Masaaki Yoshida
- 申请人地址: JP Kawasaki-shi
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2004-117693 20040413; JP2004-181067 20040618; JP2004-181068 20040618
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F7/004 ; C08F224/00
摘要:
A polymer compound that, within a chemically amplified positive resist system, exhibits a significant change in alkali solubility from a state prior to exposure to that following exposure, as well as a photoresist composition that includes such a polymer compound and a method for forming a resist pattern, which are capable of forming fine patterns with a high level of resolution. The polymer compound includes, as an alkali-soluble group (i), a substituent group in which a group selected from amongst alcoholic hydroxyl groups, carboxyl groups, and phenolic hydroxyl groups is protected with an acid dissociable, dissolution inhibiting group (ii) represented by a general formula (1) shown below: [Formula 1] —CH2—O-AO—CH2—]n (1) (wherein, A represents an organic group of 1 to 20 carbon atoms with a valency of at least n+1, and n represents an integer from 1 to 4).
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