发明申请
US20100154790A1 PROCESS FOR MANUFACTURING AN INTEGRATED MEMBRANE OF NOZZLES IN MEMS TECHNOLOGY FOR A SPRAY DEVICE AND SPRAY DEVICE USING SUCH MEMBRANE
审中-公开
在使用这种膜的喷雾装置和喷射装置的MEMS技术中制造喷嘴的集成膜的方法
- 专利标题： PROCESS FOR MANUFACTURING AN INTEGRATED MEMBRANE OF NOZZLES IN MEMS TECHNOLOGY FOR A SPRAY DEVICE AND SPRAY DEVICE USING SUCH MEMBRANE
- 专利标题（中）： 在使用这种膜的喷雾装置和喷射装置的MEMS技术中制造喷嘴的集成膜的方法
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申请号： US12645380申请日： 2009-12-22
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公开(公告)号： US20100154790A1公开(公告)日： 2010-06-24
- 发明人: Angelo Antonio Merassi , Angelo Pesci , Benedetto Vigna , Ernestino Galeazzi , Marco Mantovani
- 申请人： Angelo Antonio Merassi , Angelo Pesci , Benedetto Vigna , Ernestino Galeazzi , Marco Mantovani
- 申请人地址： IT Agrate Brianza
- 专利权人： STMICROELECTRONICS S.R.L.
- 当前专利权人： STMICROELECTRONICS S.R.L.
- 当前专利权人地址： IT Agrate Brianza
- 优先权： ITTO2008A000980 20081223
- 主分类号： A61M11/08
- IPC分类号： A61M11/08 ; B23P17/00 ; A61M15/00 ; B05B17/00
摘要：
A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.
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