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1.发明授权Microelectromechanical sensor with non-conductive sensing mass, and method of sensing through a microelectromechanical sensor 有权具有非导电感测质量的微机电传感器，以及通过微机电传感器检测的方法公开(公告)号：US09080871B2
公开(公告)日：2015-07-14
申请号：US13612583
申请日：2012-09-12
IPC分类号： G01C19/56 , G01P15/125 , G01C19/5762 , G01C19/5755
CPC分类号： G01C19/5762 , G01C19/5755 , G01P15/125
摘要： A microelectromechanical sensor includes: a supporting structure, having at least one first electrode and one second electrode, which form a capacitor; and a sensing mass made of non-conductive material, which is arranged so as to interact with an electric field associated to the capacitor and is movable with respect to the supporting structure according to a degree of freedom so that a relative position of the sensing mass with respect to the first electrode and to the second electrode is variable in response to external stresses. The sensing mass is made of a material selected in the group consisting of: intrinsic semiconductor materials, oxides of semiconductor materials, and nitrides of semiconductor materials.
摘要翻译： 微机电传感器包括：支撑结构，其具有形成电容器的至少一个第一电极和一个第二电极; 以及由非导电材料制成的传感块，其被布置成与与电容器相关联的电场相互作用并且可以根据自由度相对于支撑结构移动，使得感测质量块的相对位置 相对于第一电极和第二电极响应于外部应力而变化。 传感质量由选自本征半导体材料，半导体材料的氧化物和半导体材料的氮化物组成的组中选择的材料制成。
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2.发明申请MICROELECTROMECHANICAL SENSOR WITH NON-CONDUCTIVE SENSING MASS, AND METHOD OF SENSING THROUGH A MICROELECTROMECHANICAL SENSOR 有权具有非导电感测质量的微电子传感器和通过微电子传感器进行感测的方法公开(公告)号：US20130081466A1
公开(公告)日：2013-04-04
申请号：US13612583
申请日：2012-09-12
IPC分类号： G01C19/56
CPC分类号： G01C19/5762 , G01C19/5755 , G01P15/125
摘要： A microelectromechanical sensor includes: a supporting structure, having at least one first electrode and one second electrode, which form a capacitor; and a sensing mass made of non-conductive material, which is arranged so as to interact with an electric field associated to the capacitor and is movable with respect to the supporting structure according to a degree of freedom so that a relative position of the sensing mass with respect to the first electrode and to the second electrode is variable in response to external stresses. The sensing mass is made of a material selected in the group consisting of: intrinsic semiconductor materials, oxides of semiconductor materials, and nitrides of semiconductor materials.
摘要翻译： 微机电传感器包括：支撑结构，其具有形成电容器的至少一个第一电极和一个第二电极; 以及由非导电材料制成的传感块，其被布置成与与电容器相关联的电场相互作用并且可以根据自由度相对于支撑结构移动，使得感测质量块的相对位置 相对于第一电极和第二电极响应于外部应力而变化。 传感质量由选自本征半导体材料，半导体材料的氧化物和半导体材料的氮化物组成的组中选择的材料制成。
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公开(公告)号：US08661900B2
公开(公告)日：2014-03-04
申请号：US12014563
申请日：2008-01-15
IPC分类号： G01P15/08
CPC分类号： B81B3/0051 , B81B2201/0235 , G01P15/0802 , G01P2015/0831
摘要： In a microelectromechanical device, a mobile mass is suspended above a substrate via elastic suspension elements and is rotatable about said elastic suspension elements, a cover structure is set above the mobile mass and has an internal surface facing the mobile mass, and a stopper structure is arranged at the internal surface of the cover structure and extends towards the mobile mass in order to stop a movement of the mobile mass away from the substrate along an axis (z) transverse to the substrate. The stopper structure is arranged with respect to the mobile mass so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass about the elastic suspension elements.
摘要翻译： 在微机电装置中，移动物质通过弹性悬挂元件悬挂在基底上方并且可围绕所述弹性悬挂元件旋转，盖结构设置在移动质量块的上方并具有面向移动质量块的内表面，并且止动结构 布置在盖结构的内表面并朝着移动块延伸，以便沿横向于基底的轴线（z）停止移动块离开基底的运动。 止动器结构相对于移动物质布置，以便减少相互静电相互作用的影响，特别是使得可移动物体围绕弹性悬挂元件的最终扭转力矩最小化。
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4.发明申请INTEGRATED ACOUSTIC TRANSDUCER IN MEMS TECHNOLOGY, AND MANUFACTURING PROCESS THEREOF 有权MEMS技术中的集成式声学传感器及其制造工艺公开(公告)号：US20100158280A1
公开(公告)日：2010-06-24
申请号：US12644846
申请日：2009-12-22
CPC分类号： B81C1/00182 , B81B3/0035 , B81B3/0072 , B81B2201/0257 , B81C1/00158 , H04R7/24 , H04R19/005 , H04R19/04 , H04R31/00 , Y10T29/49005
摘要： A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.
摘要翻译： MEMS声换能器，例如麦克风，包括设置有空腔的基板，固定到基板的支撑结构，具有周缘和质心的膜，悬挂在空腔上方并固定到基板上，膜构造 通过支撑结构振荡。 支撑结构包括固定在膜上的多个锚定元件，并且每个锚定元件在膜的质心和周边之间连接到膜的相应部分。
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公开(公告)号：US20080173959A1
公开(公告)日：2008-07-24
申请号：US12014563
申请日：2008-01-15
CPC分类号： B81B3/0051 , B81B2201/0235 , G01P15/0802 , G01P2015/0831
摘要： In a microelectromechanical device, a mobile mass is suspended above a substrate via elastic suspension elements and is rotatable about said elastic suspension elements, a cover structure is set above the mobile mass and has an internal surface facing the mobile mass, and a stopper structure is arranged at the internal surface of the cover structure and extends towards the mobile mass in order to stop a movement of the mobile mass away from the substrate along an axis (z) transverse to the substrate. The stopper structure is arranged with respect to the mobile mass so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass about the elastic suspension elements.
摘要翻译： 在微机电装置中，移动物质通过弹性悬挂元件悬挂在基底上方并且可围绕所述弹性悬挂元件旋转，盖结构设置在移动质量块的上方并具有面向移动质量块的内表面，并且止动结构 布置在盖结构的内表面并朝着移动块延伸，以便沿横向于基底的轴线（z）停止移动块离开基底的运动。 止动器结构相对于移动物质布置，以便减少相互静电相互作用的影响，特别是使得可移动物体围绕弹性悬挂元件的最终扭转力矩最小化。
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6.发明授权Integrated acoustic transducer in MEMS technology, and manufacturing process thereof 有权MEMS技术中的集成声换能器及其制造工艺公开(公告)号：US08565452B2
公开(公告)日：2013-10-22
申请号：US12644846
申请日：2009-12-22
IPC分类号： H04R25/00 , H04R9/08 , H04R11/04 , H04R17/02 , H04R19/04 , H04R21/02 , H04R1/00 , H04R9/06 , H04R11/02
CPC分类号： B81C1/00182 , B81B3/0035 , B81B3/0072 , B81B2201/0257 , B81C1/00158 , H04R7/24 , H04R19/005 , H04R19/04 , H04R31/00 , Y10T29/49005
摘要： A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.
摘要翻译： MEMS声换能器，例如麦克风，包括设置有空腔的基板，固定到基板的支撑结构，具有周缘和质心的膜，悬挂在空腔上方并固定到基板上，膜构造 通过支撑结构振荡。 支撑结构包括固定在膜上的多个锚定元件，并且每个锚定元件在膜的质心和周边之间连接到膜的相应部分。
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7.发明申请PROCESS FOR MANUFACTURING AN INTEGRATED MEMBRANE OF NOZZLES IN MEMS TECHNOLOGY FOR A SPRAY DEVICE AND SPRAY DEVICE USING SUCH MEMBRANE 审中-公开在使用这种膜的喷雾装置和喷射装置的MEMS技术中制造喷嘴的集成膜的方法公开(公告)号：US20100154790A1
公开(公告)日：2010-06-24
申请号：US12645380
申请日：2009-12-22
CPC分类号： A61M15/009 , B05B1/14 , B05B17/0638 , B05D7/00 , B81B2201/058 , B81B2203/0127 , B81C1/00087 , Y10T29/49401
摘要： A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.
摘要翻译： 一种喷雾装置的喷嘴膜的制造方法，其特征在于，包括以下步骤：在所述基材上形成膜层，在所述膜层上形成膜层，在所述膜层中形成多个喷嘴，在所述基材中形成多个供给流路， 供应通道在垂直方向上基本上对准多个喷嘴中的相应喷嘴并与相应喷嘴直接连通。
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