发明申请
- 专利标题: Polishing composition for semiconductor wafer
- 专利标题(中): 半导体晶圆抛光组合物
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申请号: US12653683申请日: 2009-12-17
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公开(公告)号: US20100163786A1公开(公告)日: 2010-07-01
- 发明人: Masahiro Izumi , Masaru Nakajo , Yukiyo Saito , Kuniaki Maejima , Hiroaki Tanaka
- 申请人: Masahiro Izumi , Masaru Nakajo , Yukiyo Saito , Kuniaki Maejima , Hiroaki Tanaka
- 优先权: JP2008-330548 20081225
- 主分类号: C09K13/00
- IPC分类号: C09K13/00
摘要:
A polishing composition for semiconductor wafer polishing comprising, colloidal silica prepared from an active silicic acid aqueous solution obtained by removal of alkali from alkali silicate and at least one nitrogen containing basic compound selected from a group consisting of ethylenediamine, diethylenediamine, imidazole, methylimidazole, piperidine, morpholine, arginine, and hydrazine, wherein pH of the colloidal silica is of 8.5 to 11.0 at 25° C. by containing quaternary ammonium hydroxide.
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