发明申请
- 专利标题: Linear Motor Magnetic Shield Apparatus
- 专利标题(中): 线性电机磁屏蔽装置
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申请号: US12622665申请日: 2009-11-20
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公开(公告)号: US20100165311A1公开(公告)日: 2010-07-01
- 发明人: Kalyan Kumar MANKALA , Roberto Bernardo Wiener , Pradeep Kumar Govil , Andrew Nelson
- 申请人: Kalyan Kumar MANKALA , Roberto Bernardo Wiener , Pradeep Kumar Govil , Andrew Nelson
- 申请人地址: NL Veldhoven
- 专利权人: ASML Holding N.V.
- 当前专利权人: ASML Holding N.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: G03B27/42
- IPC分类号: G03B27/42 ; H02K41/03 ; G03B27/58
摘要:
A magnetic shield having non-magnetic gaps provides reduced magnetic cross-talk for a linear motor array in a precision positioning system. Redirecting the leakage flux limits the cross-talk and associated deleterious effects. Such preferred magnetic circuit paths for the leakage are affixed to the moving magnet system of the linear motor. Embodiments of the preferred flux leakage paths are realized by providing a ferromagnetic shield separated by a non-magnetic gap between the permanent magnets and the back-irons. In another embodiment, the ferromagnetic shield separation includes diamagnetic materials.
公开/授权文献
- US09130443B2 Linear motor magnetic shield apparatus 公开/授权日:2015-09-08
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