发明申请
- 专利标题: LASER DEVICE
- 专利标题(中): 激光装置
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申请号: US12683612申请日: 2010-01-07
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公开(公告)号: US20100182579A1公开(公告)日: 2010-07-22
- 发明人: Erik Roelof Loopstra , Gerardus Hubertus Petrus Maria Swinkels , Erik Petrus Buurman
- 申请人: Erik Roelof Loopstra , Gerardus Hubertus Petrus Maria Swinkels , Erik Petrus Buurman
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; H01S3/10 ; G21K5/04
摘要:
A laser device includes a seed laser, an amplifier, a detector, and an optical element arranged to direct radiation emitted by the seed laser towards a plasma generation site. The optical element is arranged to direct towards the detector amplified spontaneous emission radiation which has been emitted by the seed laser and has been reflected from a droplet of fuel material. The detector is arranged to trigger generation of a laser radiation pulse by the seed laser when the reflected amplified spontaneous emission radiation is detected.
公开/授权文献
- US08462826B2 Laser device 公开/授权日:2013-06-11
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