发明申请
- 专利标题： DEVICES AND METHODS FOR PREVENTING CAPACITOR LEAKAGE
- 专利标题（中）： 用于防止电容器泄漏的装置和方法
-
申请号： US12753594申请日： 2010-04-02
-
公开(公告)号： US20100187589A1公开(公告)日： 2010-07-29
- 发明人: Kuo-Chi TU
- 申请人： Kuo-Chi TU
- 主分类号： H01L27/108
- IPC分类号： H01L27/108 ; H01L21/02
摘要：
Devices and methods for preventing capacitor leakage caused by sharp tip. The formation of sharp tip is avoided by a thicker bottom electrode which fully fills a micro-trench that induces formation of the sharp tip. Alternatively, formation of the sharp tip can be avoided by recessing the contact plug to substantially eliminate the micro-trench
公开/授权文献
- US08487361B2 Devices and methods for preventing capacitor leakage 公开/授权日：2013-07-16