Invention Application
- Patent Title: CURRENT RESTRICTING ELEMENT, MEMORY APPARATUS INCORPORATING CURRENT RESTRICTING ELEMENT, AND FABRICATION METHOD THEREOF
- Patent Title (中): 电流限制元件,包含电流限制元件的记忆装置及其制造方法
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Application No.: US12669174Application Date: 2008-07-11
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Publication No.: US20100193760A1Publication Date: 2010-08-05
- Inventor: Takeshi Takagi , Takumi Mikawa , Koji Arita , Mitsuteru Iijima , Takashi Okada
- Applicant: Takeshi Takagi , Takumi Mikawa , Koji Arita , Mitsuteru Iijima , Takashi Okada
- Priority: JP2007-186622 20070718
- International Application: PCT/JP2008/001867 WO 20080711
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/04 ; H01L21/02

Abstract:
In a current rectifying element (10), a barrier height φA of a center region (14) of a barrier layer (11) in a thickness direction thereof sandwiched between a first electrode layer (12) and a second electrode layer (13) is formed to be larger than a barrier height φB of a region in the vicinity of an interface (17) between the barrier layer (11) and the first electrode layer (12) and an interface (17) between the barrier layer (11) and the second electrode layer (13). The barrier layer (11) has, for example, a triple-layer structure of barrier layers (11a), (11b) and (11c). The barrier layers (11a), (11b) and (11c) are, for example, formed by SiN layers of SiNx2, SiNx1, and SiNx1 (X1
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