发明申请
- 专利标题: METHOD FOR FORMING A PATTERNED LAYER ON A SUBSTRATE
- 专利标题(中): 在基板上形成图案层的方法
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申请号: US12666838申请日: 2008-06-30
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公开(公告)号: US20100203235A1公开(公告)日: 2010-08-12
- 发明人: Marcus Antonius Verschuuren , Herbert Lifka , Cristina Tanase
- 申请人: Marcus Antonius Verschuuren , Herbert Lifka , Cristina Tanase
- 申请人地址: NL EINDHOVEN
- 专利权人: KONINKLIJKE PHILIPS ELECTRONICS N.V.
- 当前专利权人: KONINKLIJKE PHILIPS ELECTRONICS N.V.
- 当前专利权人地址: NL EINDHOVEN
- 优先权: EP07111734.5 20070704; EP07116650.8 20070918
- 国际申请: PCT/IB2008/052612 WO 20080630
- 主分类号: B05D5/12
- IPC分类号: B05D5/12
摘要:
This invention relates to a method for forming a patterned layer on a substrate by means of an imprint process. According to the method a first layer is provided on the substrate, and a pattern of recesses is provided in the first layer by imprinting the layer with a patterning means. Then the first layer is cured. The curing is followed by performing a first surface treatment onto the first layer to make the surface of thereof hydrophilic, and then performing a second surface treatment onto a selected subarea of the surface of the first layer to make the. subarea hydrophobic. The subarea includes surface portions between the recesses and excludes the recesses. Finally, a conducting pattern material (41) is deposited into the recesses.
公开/授权文献
- US09105867B2 Method for forming a patterned layer on a substrate 公开/授权日:2015-08-11
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