发明申请
US20100203235A1 METHOD FOR FORMING A PATTERNED LAYER ON A SUBSTRATE 有权
在基板上形成图案层的方法

METHOD FOR FORMING A PATTERNED LAYER ON A SUBSTRATE
摘要:
This invention relates to a method for forming a patterned layer on a substrate by means of an imprint process. According to the method a first layer is provided on the substrate, and a pattern of recesses is provided in the first layer by imprinting the layer with a patterning means. Then the first layer is cured. The curing is followed by performing a first surface treatment onto the first layer to make the surface of thereof hydrophilic, and then performing a second surface treatment onto a selected subarea of the surface of the first layer to make the. subarea hydrophobic. The subarea includes surface portions between the recesses and excludes the recesses. Finally, a conducting pattern material (41) is deposited into the recesses.
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