发明申请
- 专利标题: METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM
- 专利标题(中): 制造磁记录介质的方法
-
申请号: US12705490申请日: 2010-02-12
-
公开(公告)号: US20100214695A1公开(公告)日: 2010-08-26
- 发明人: Yousuke Isowaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
- 申请人: Yousuke Isowaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-038206 20090220
- 主分类号: B44C1/22
- IPC分类号: B44C1/22 ; G11B5/82
摘要:
According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist by means of a first etching gas, etching the second hard mask by means of the first etching gas using the patterned resist as a mask to transfer the patterns to the second hard mask, etching the first hard mask by means of a second etching gas different from the first etching gas using the second hard mask as a mask to transfer the patterns to the first hard mask, and performing ion beam etching in order to deactivate the magnetic recording layer exposed in the recesses and to remove the second hard mask.
公开/授权文献
- US08057689B2 Method of manufacturing magnetic recording medium 公开/授权日:2011-11-15
信息查询