发明申请
- 专利标题: Lighting method of light source apparatus
- 专利标题(中): 光源设备的照明方法
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申请号: US12659323申请日: 2010-03-04
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公开(公告)号: US20100225232A1公开(公告)日: 2010-09-09
- 发明人: Taku Sumitomo , Toshio Yokota
- 申请人: Taku Sumitomo , Toshio Yokota
- 申请人地址: JP Tokyo
- 专利权人: USHIO DENKI KABUSHIKI KAISHA
- 当前专利权人: USHIO DENKI KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-050161 20090304
- 主分类号: H01J17/30
- IPC分类号: H01J17/30
摘要:
A method of lighting a light source apparatus that has a discharge lamp, a reflection mirror for reflecting light emitted from the discharge lamp, a light emission optical system for irradiating a work piece with light, one or more laser oscillator for emitting a laser beam to the discharge lamp, and a discharge starting unit for starting discharge. The method includes removing deposits adhering to an inner face of the discharge lamp by irradiating a discharge vessel with the laser beam from the first laser oscillator, starting discharge in the discharge vessel by the discharge starting unit, and condensing the laser beam from a second laser oscillator, into the discharge vessel.
公开/授权文献
- US08358069B2 Lighting method of light source apparatus 公开/授权日:2013-01-22
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