The present invention is intended to provide a method for manufacturing an organic EL device, which method can form a film having high barrier properties to water vapor or oxygen, while suppressing damage to an organic EL element, during formation of the film including inorganic layers for sealing the organic EL element. When an organic EL element (20) which is composed of a pair of electrodes in which at least one of the electrodes being transparent or translucent and an organic EL layer (22) which comprises a light-emitting layer held between the electrodes, and a sealing layer (30) which includes at least one layer of inorganic film being in contact with the organic EL element (20) and which seals the organic EL element (20) are formed on a substrate (10), a first sealing film (31) which is included in the sealing layer (30) and which is in contact with the organic EL element (20) is formed by ion beam sputtering method, and the other inorganic film which is included in the sealing layer (30) is formed by any method other than the ion beam sputtering method.