发明申请
- 专利标题: Method of Particle Contaminant Removal
- 专利标题(中): 颗粒污染物去除方法
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申请号: US12401590申请日: 2009-03-10
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公开(公告)号: US20100229890A1公开(公告)日: 2010-09-16
- 发明人: Yizhak T. Sabba , Seokmin Yun , Mark Kawaguchi , Mark Wilcoxson , Dragan Podlesnik
- 申请人: Yizhak T. Sabba , Seokmin Yun , Mark Kawaguchi , Mark Wilcoxson , Dragan Podlesnik
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corp.
- 当前专利权人: Lam Research Corp.
- 当前专利权人地址: US CA Fremont
- 主分类号: B08B3/00
- IPC分类号: B08B3/00 ; B08B7/00
摘要:
Apparatus and methods for removing particle contaminants from a surface of a substrate includes coating a layer of a viscoelastic material on the surface. The viscoelastic material is coated as a thin film and exhibits substantial liquid-like characteristic. An external force is applied to a first area of the surface coated with the viscoelastic material such that a second area of the surface coated with the viscoelastic material is not substantially subjected to the applied force. The force is applied for a time duration that is shorter than a intrinsic time of the viscoelastic material so as to access solid-like characteristic of the viscoelastic material. The viscoelastic material exhibiting solid-like characteristic interacts at least partially with at least some of the particle contaminants present on the surface. The viscoelastic material along with at least some of the particle contaminants is removed from the first area of the surface while the viscoelastic material is exhibiting solid-like characteristics.
公开/授权文献
- US08828145B2 Method of particle contaminant removal 公开/授权日:2014-09-09