A piezoelectric actuator comprises a co-fired stack of piezoelectric elements formed from a piezoelectric material and a plurality of positive internal electrodes interdigitated with a plurality of negative internal electrodes throughout the stack to define active regions of the piezoelectric material which are responsive to a voltage applied across the internal electrodes, in use. An external positive electrode connects with the positive internal electrodes and an external negative electrode connects with the negative internal electrodes. The actuator is characterised in that the stack further comprises means for deliberately creating artificial cracks within the stack at a location at which the artificial cracks do not give rise to a short circuit between the internal electrodes but serve to relieve stresses within the piezoelectric material.