发明申请
US20100242242A1 METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR 失效
制造压电致动器的方法

METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR
摘要:
There is provided a method for manufacturing a piezoelectric actuator where the planar shape is adjusted by subjecting the piezoelectric body layer located on one of the outer surfaces in the two or more piezoelectric body layers to a polarization treatment to control remnant polarization of the piezoelectric body layer. The piezoelectric actuator is used as a drive portion of a piezoelectric drive type variable capacitor. The variable capacitor has high mechanical strength and excellent reliability for a long period of time. The relation between the displacement amount of the piezoelectric actuator and the capacity of the capacitor is stable, and the variable capacity is wide.
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