PIEZOELECTRIC/ELECTROSTRICTIVE ACTUATOR
    1.
    发明申请
    PIEZOELECTRIC/ELECTROSTRICTIVE ACTUATOR 有权
    压电/电致动器

    公开(公告)号:US20120062071A1

    公开(公告)日:2012-03-15

    申请号:US13206837

    申请日:2011-08-10

    申请人: Takashi EBIGASE

    发明人: Takashi EBIGASE

    IPC分类号: H01L41/053

    摘要: A piezoelectric/electrostrictive actuator, including a piezoelectric/electrostrictive element that includes at least one laminate including one piezoelectric/electrostrictive layer and one pair of electrodes disposed respectively on both sides of said piezoelectric/electrostrictive layer and has a moving part corresponding to a portion where said piezoelectric/electrostrictive layer is sandwiched by one pair of said electrodes and a non-moving part corresponding to a portion where said piezoelectric/electrostrictive layer is not sandwiched by one pair of said electrodes, and a moisture proof membrane disposed to cover at least the proximity of the boundary between said moving part and said non-moving part and consisting of silicone-based organic insulation material with storage elastic modulus of 100 kPa or less obtained by dynamic viscoelastic measurement using a parallel cone with diameter of 25 mm under a condition with strain of 0.1%, frequency of 1 Hz, gap of 0.5 mm and temperature of 22° C.

    摘要翻译: 一种压电/电致伸缩致动器,包括压电/电致伸缩元件,其包括分别包括一个压电/电致伸缩层和分别位于所述压电/电致伸缩层的两侧上的一对电极的至少一个层压体,并且具有对应于 所述压电/电致伸缩层被一对所述电极夹在中间,而非移动部分对应于所述压电/电致伸缩层未被一对所述电极夹持的部分,以及防潮膜,至少覆盖 在所述移动部分和所述非移动部分之间的边界附近,并且通过使用直径为25mm的平行锥体的动态粘弹性测量获得的具有100kPa以下的储存弹性模量的硅酮有机绝缘材料, 应变为0.1%,频率为1Hz,间隙为0.5mm和温度 e为22°C

    PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT
    2.
    发明申请
    PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT 有权
    压电元件

    公开(公告)号:US20080213575A1

    公开(公告)日:2008-09-04

    申请号:US12032128

    申请日:2008-02-15

    IPC分类号: B32B7/02

    摘要: In the manufacture of a laminated piezoelectric/electrostrictive element by lamination of a piezoelectric/electrostrictive film and an electrode film containing either platinum or an alloy composed mainly of platinum and having a thickness of 2.0 μm or less, both or either one of yttrium oxide (Y2O3) and cerium oxide (CeO2) is added to the electrode film or the piezoelectric/electrostrictive film, and the electrode film and the piezoelectric/electrostrictive film are fired simultaneously. This simultaneously achieves a reduced thickness and improved thermal resistance of the electrode film and a reduced change in piezoelectric/electrostrictive properties with time, thereby producing a piezoelectric/electrostrictive element with good initial piezoelectric/electrostrictive properties and with a small change in the piezoelectric/electrostrictive properties with time.

    摘要翻译: 在通过层叠压电/电致伸缩膜和包含铂或主要由铂组成的并且厚度为2.0μm或更小的合金的电极膜制造层压压电/电致伸缩元件时,氧化钇( Y 2 N 3 O 3)和氧化铈(CeO 2 S 2)加入到电极膜或压电/电致伸缩膜中,并且电极膜 同时对压电/电致伸缩膜进行烧制。 这同时实现了电极膜的减小的厚度和改善的热阻,并且随着时间的推移,压电/电致伸缩特性的变化减小,从而产生具有良好的初始压电/电致伸缩特性的压电/电致伸缩元件,并且压电/电致伸缩 随着时间的推移。

    Piezoelectric/electrostrictive element
    3.
    发明授权
    Piezoelectric/electrostrictive element 有权
    压电/电致伸缩元件

    公开(公告)号:US08742650B2

    公开(公告)日:2014-06-03

    申请号:US12032128

    申请日:2008-02-15

    摘要: In the manufacture of a laminated piezoelectric/electrostrictive element by lamination of a piezoelectric/electrostrictive film and an electrode film containing either platinum or an alloy composed mainly of platinum and having a thickness of 2.0 μm or less, both or either one of yttrium oxide (Y2O3) and cerium oxide (CeO2) is added to the electrode film or the piezoelectric/electrostrictive film, and the electrode film and the piezoelectric/electrostrictive film are fired simultaneously. This simultaneously achieves a reduced thickness and improved thermal resistance of the electrode film and a reduced change in piezoelectric/electrostrictive properties with time, thereby producing a piezoelectric/electrostrictive element with good initial piezoelectric/electrostrictive properties and with a small change in the piezoelectric/electrostrictive properties with time.

    摘要翻译: 在通过层叠压电/电致伸缩膜和包含铂或主要由铂组成的并且厚度为2.0μm或更小的合金的电极膜制造层压压电/电致伸缩元件时,氧化钇( Y2O3)和氧化铈(CeO 2)加入到电极膜或压电/电致伸缩膜中,同时对电极膜和压电/电致伸缩膜进行烧制。 这同时实现了电极膜的减小的厚度和改善的热阻,并且随着时间的推移,压电/电致伸缩特性的变化减小,从而产生具有良好的初始压电/电致伸缩特性的压电/电致伸缩元件,并且压电/电致伸缩 随着时间的推移。

    PIEZOELECTRIC/ELECTROSTRICTIVE CERAMICS AND PIEZOELECTRIC/ELECTROSTRICTIVE DEVICE
    4.
    发明申请
    PIEZOELECTRIC/ELECTROSTRICTIVE CERAMICS AND PIEZOELECTRIC/ELECTROSTRICTIVE DEVICE 失效
    压电/静电陶瓷和压电/电绝缘设备

    公开(公告)号:US20090267446A1

    公开(公告)日:2009-10-29

    申请号:US12492409

    申请日:2009-06-26

    摘要: The piezoelectric/electrostrictive properties and mechanical durability of a piezoelectric/electrostrictive ceramic can be improved. A piezoelectric/electrostrictive device has a laminated structure in which an electrode film, a piezoelectric/electrostrictive film, an electrode film, an piezoelectric/electrostrictive film, and an electrode film are laminated in the order mentioned on a thin portion of a substrate. The piezoelectric/electrostrictive films are ceramic films with a matrix of perovskite oxide that contains lead (Pb) as an A-site component and nickel (Ni), aluminum (Al), niobium (Nb), zirconium (Zr), and titanium (Ti) as B-site components. The piezoelectric/electrostrictive films are formed by firing as a unit the substrate that contains aluminum oxide and an intermediate coating film of perovskite oxide that contains components other than aluminum so that aluminum oxide is diffused from the substrate to the intermediate coating film.

    摘要翻译: 可以提高压电/电致伸缩陶瓷的压电/电致伸缩性能和机械耐久性。 压电/电致伸缩器件具有层压结构,其中电极膜,压电/电致伸缩膜,电极膜,压电/电致伸缩膜和电极膜以按照衬底薄部分的顺序层压。 压电/电致伸缩膜是具有钙钛矿氧化物基质的陶瓷膜,其包含铅(Pb)作为A位组分,镍(Ni),铝(Al),铌(Nb),锆(Zr)和钛( Ti)作为B位组分。 压电/电致伸缩膜通过以包含氧化铝的基板和包含除了铝以外的成分的钙钛矿氧化物的中间涂层作为单元进行烧结而形成,使得氧化铝从基板扩散到中间涂膜。

    METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT
    6.
    发明申请
    METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT 有权
    制造压电元件的方法

    公开(公告)号:US20110289744A1

    公开(公告)日:2011-12-01

    申请号:US13115442

    申请日:2011-05-25

    IPC分类号: H01L41/22

    摘要: There is disclosed a method of manufacturing a piezoelectric element including a step of preparing a green sheet A including a portion which becomes a fired piezoelectric body later, by use of a piezoelectric material; a step of joining, to at least one surface of the green sheet A, a green sheet B having an opening in a portion facing the portion which becomes the fired piezoelectric body later, followed by firing to obtain the fired piezoelectric body provided with a reinforcing plate to which the reinforcing plate formed owing to the firing of the green sheet B is attached; and a step of forming a film-like electrode in a portion obtained by the firing of the green sheet A in the fired piezoelectric body provided with the reinforcing plate.

    摘要翻译: 公开了一种制造压电元件的方法,包括以下步骤:通过使用压电材料制备包括成为烧结压电体的部分的生片A. 在生坯片A的至少一个表面上接合具有开口的生坯片B,其后面部分成为烧结压电体的部分,然后进行烧制,以获得具有加强层的烧结压电体 安装由于生坯B的烧制而形成的加强板的板; 以及在设置有加强板的烧结压电体中通过焙烧生片A而获得的部分中形成膜状电极的步骤。

    Piezoelectric/electrostrictive element and method of manufacturing piezoelectric/electrostrictive element
    7.
    发明授权
    Piezoelectric/electrostrictive element and method of manufacturing piezoelectric/electrostrictive element 有权
    压电/电致伸缩元件及制造压电/电致伸缩元件的方法

    公开(公告)号:US07911113B1

    公开(公告)日:2011-03-22

    申请号:US12552326

    申请日:2009-09-02

    IPC分类号: H01L41/08

    摘要: A piezoelectric/electrostrictive element having a double-layer structure in which a lower layer electrode film, a lower layer piezoelectric/electrostrictive film, an inner layer electrode film, an upper layer piezoelectric/electrostrictive film and an upper layer electrode film are laminated in this order on a thin portion of a substrate. In the piezoelectric/electrostrictive element, a driving signal is applied between an outer layer electrode film and the inner layer electrode film, whereby the thin portion and a laminate can be subjected to bending vibration. The piezoelectric/electrostrictive film has film thickness distribution in which a film thickness becomes larger in a continuous manner from a center portion of a bending vibration region which is an antinode of a bending first mode toward an edge portion of the bending vibration region which is a node of the bending first mode, along a short side direction of the bending vibration region.

    摘要翻译: 具有下层电极膜,下层压电/电致伸缩膜,内层电极膜,上层压电/电致伸缩膜和上层电极膜的双层结构的压电/电致伸缩元件 在基板的薄部分上排列。 在压电/电致伸缩元件中,在外层电极膜和内层电极膜之间施加驱动信号,由此能够使薄壁部和层叠体发生弯曲振动。 压电/电致伸缩膜具有膜厚分布,其中,从弯曲振动区域的弯曲振动区域的中心部分到连续弯曲振动区域的弯曲振动区域的边缘部分,膜厚度变大 弯曲第一模式的节点沿着弯曲振动区域的短边方向。

    METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR
    8.
    发明申请
    METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR 失效
    制造压电致动器的方法

    公开(公告)号:US20100242242A1

    公开(公告)日:2010-09-30

    申请号:US12729532

    申请日:2010-03-23

    IPC分类号: H04R17/00

    摘要: There is provided a method for manufacturing a piezoelectric actuator where the planar shape is adjusted by subjecting the piezoelectric body layer located on one of the outer surfaces in the two or more piezoelectric body layers to a polarization treatment to control remnant polarization of the piezoelectric body layer. The piezoelectric actuator is used as a drive portion of a piezoelectric drive type variable capacitor. The variable capacitor has high mechanical strength and excellent reliability for a long period of time. The relation between the displacement amount of the piezoelectric actuator and the capacity of the capacitor is stable, and the variable capacity is wide.

    摘要翻译: 提供一种制造压电致动器的方法,其中通过使位于两个或更多个压电体层中的一个外表面上的压电体层进行极化处理来调节压电体层的残留极化,从而调整平面形状 。 压电致动器用作压电驱动型可变电容器的驱动部分。 可变电容器长时间具有高机械强度和优异的可靠性。 压电致动器的位移量与电容器的容量之间的关系是稳定的,并且可变容量很宽。

    Piezoelectric device
    9.
    发明申请
    Piezoelectric device 审中-公开
    压电元件

    公开(公告)号:US20060158068A1

    公开(公告)日:2006-07-20

    申请号:US11327859

    申请日:2006-01-09

    IPC分类号: H01L41/187

    摘要: There is disclosed a piezoelectric device which has a remarkably high piezoelectric characteristic and which is superior in a vibration transmitting property between a substrate and a piezoelectric portion and in which linearity of a flexural displacement with respect to a voltage is high up to a high voltage region and which exhibits a high durability even in a case where the device is used with a large flexural displacement for a long period. The piezoelectric device is provided with: a substrate 2 made of a ceramic; a piezoelectric portion 1 constituted of a piezoelectric porcelain composition containing as a major component a Pb(Mg, Ni)1/3Nb2/3O3—PbZrO3—PbTiO3 ternary solid solution system composition represented by a predetermined formula; and an electrode 3 electrically connected to the piezoelectric portion 1, and the piezoelectric portion 1 is solidly attached onto the substrate 2 directly or via the electrode 3.

    摘要翻译: 公开了一种具有非常高的压电特性的压电器件,其在衬底和压电部件之间的振动传递性能优异,并且其中相对于电压的弯曲位移的线性度高达高电压区域 并且即使在长期使用具有大的弯曲位移的装置的情况下也显示出高的耐久性。 压电装置设置有:由陶瓷制成的基板2; 由作为主成分的Pb(Mg,Ni)1/3 Nb 3/3/3 O 3的压电陶瓷组合物构成的压电体1, 由预定公式表示的三元固体溶液体系组合物; 以及电连接到压电部分1的电极3,并且压电部分1直接或经由电极3牢固地附接到基板2上。

    Piezoelectric/electrostrictive actuator
    10.
    发明授权
    Piezoelectric/electrostrictive actuator 有权
    压电/电致伸缩致动器

    公开(公告)号:US08575822B2

    公开(公告)日:2013-11-05

    申请号:US13206837

    申请日:2011-08-10

    申请人: Takashi Ebigase

    发明人: Takashi Ebigase

    IPC分类号: H01L41/08

    摘要: A piezoelectric/electrostrictive actuator, including a piezoelectric/electrostrictive element that includes at least one laminate including one piezoelectric/electrostrictive layer and one pair of electrodes disposed respectively on both sides of said piezoelectric/electrostrictive layer and has a moving part corresponding to a portion where said piezoelectric/electrostrictive layer is sandwiched by one pair of said electrodes and a non-moving part corresponding to a portion where said piezoelectric/electrostrictive layer is not sandwiched by one pair of said electrodes, and a moisture proof membrane disposed to cover at least the proximity of the boundary between said moving part and said non-moving part and consisting of silicone-based organic insulation material with storage elastic modulus of 100 kPa or less obtained by dynamic viscoelastic measurement using a parallel cone with diameter of 25 mm under a condition with strain of 0.1%, frequency of 1 Hz, gap of 0.5 mm and temperature of 22° C.

    摘要翻译: 一种压电/电致伸缩致动器,包括压电/电致伸缩元件,其包括分别包括一个压电/电致伸缩层和分别位于所述压电/电致伸缩层的两侧上的一对电极的至少一个层压体,并且具有对应于 所述压电/电致伸缩层被一对所述电极夹在中间,而非移动部分对应于所述压电/电致伸缩层未被一对所述电极夹持的部分,以及防潮膜,至少覆盖 在所述移动部分和所述非移动部分之间的边界附近,并且通过使用直径为25mm的平行锥体的动态粘弹性测量获得的具有100kPa以下的储存弹性模量的硅酮有机绝缘材料, 应变为0.1%,频率为1Hz,间隙为0.5mm和温度 e为22°C