摘要:
A piezoelectric/electrostrictive actuator, including a piezoelectric/electrostrictive element that includes at least one laminate including one piezoelectric/electrostrictive layer and one pair of electrodes disposed respectively on both sides of said piezoelectric/electrostrictive layer and has a moving part corresponding to a portion where said piezoelectric/electrostrictive layer is sandwiched by one pair of said electrodes and a non-moving part corresponding to a portion where said piezoelectric/electrostrictive layer is not sandwiched by one pair of said electrodes, and a moisture proof membrane disposed to cover at least the proximity of the boundary between said moving part and said non-moving part and consisting of silicone-based organic insulation material with storage elastic modulus of 100 kPa or less obtained by dynamic viscoelastic measurement using a parallel cone with diameter of 25 mm under a condition with strain of 0.1%, frequency of 1 Hz, gap of 0.5 mm and temperature of 22° C.
摘要:
In the manufacture of a laminated piezoelectric/electrostrictive element by lamination of a piezoelectric/electrostrictive film and an electrode film containing either platinum or an alloy composed mainly of platinum and having a thickness of 2.0 μm or less, both or either one of yttrium oxide (Y2O3) and cerium oxide (CeO2) is added to the electrode film or the piezoelectric/electrostrictive film, and the electrode film and the piezoelectric/electrostrictive film are fired simultaneously. This simultaneously achieves a reduced thickness and improved thermal resistance of the electrode film and a reduced change in piezoelectric/electrostrictive properties with time, thereby producing a piezoelectric/electrostrictive element with good initial piezoelectric/electrostrictive properties and with a small change in the piezoelectric/electrostrictive properties with time.
摘要翻译:在通过层叠压电/电致伸缩膜和包含铂或主要由铂组成的并且厚度为2.0μm或更小的合金的电极膜制造层压压电/电致伸缩元件时,氧化钇( Y 2 N 3 O 3)和氧化铈(CeO 2 S 2)加入到电极膜或压电/电致伸缩膜中,并且电极膜 同时对压电/电致伸缩膜进行烧制。 这同时实现了电极膜的减小的厚度和改善的热阻,并且随着时间的推移,压电/电致伸缩特性的变化减小,从而产生具有良好的初始压电/电致伸缩特性的压电/电致伸缩元件,并且压电/电致伸缩 随着时间的推移。
摘要:
In the manufacture of a laminated piezoelectric/electrostrictive element by lamination of a piezoelectric/electrostrictive film and an electrode film containing either platinum or an alloy composed mainly of platinum and having a thickness of 2.0 μm or less, both or either one of yttrium oxide (Y2O3) and cerium oxide (CeO2) is added to the electrode film or the piezoelectric/electrostrictive film, and the electrode film and the piezoelectric/electrostrictive film are fired simultaneously. This simultaneously achieves a reduced thickness and improved thermal resistance of the electrode film and a reduced change in piezoelectric/electrostrictive properties with time, thereby producing a piezoelectric/electrostrictive element with good initial piezoelectric/electrostrictive properties and with a small change in the piezoelectric/electrostrictive properties with time.
摘要:
The piezoelectric/electrostrictive properties and mechanical durability of a piezoelectric/electrostrictive ceramic can be improved. A piezoelectric/electrostrictive device has a laminated structure in which an electrode film, a piezoelectric/electrostrictive film, an electrode film, an piezoelectric/electrostrictive film, and an electrode film are laminated in the order mentioned on a thin portion of a substrate. The piezoelectric/electrostrictive films are ceramic films with a matrix of perovskite oxide that contains lead (Pb) as an A-site component and nickel (Ni), aluminum (Al), niobium (Nb), zirconium (Zr), and titanium (Ti) as B-site components. The piezoelectric/electrostrictive films are formed by firing as a unit the substrate that contains aluminum oxide and an intermediate coating film of perovskite oxide that contains components other than aluminum so that aluminum oxide is diffused from the substrate to the intermediate coating film.
摘要:
A piezoelectric/electrostrictive ceramic composition containing, as a major component, a Pb(Mg1/3Nb2/3)O3—PbTiO3—PbZrO3 ternary solid solution system composition and further containing Ni in an amount of 0.05 to 3.0% by mass in terms of NiO and Si in an amount of 0.003 to 0.01% by mass in terms of SiO2. The piezoelectric/electrostrictive ceramic composition can constitute a piezoelectric/electrostrictive body or a piezoelectric/electrostrictive portion both having an excellent piezoelectric/electrostrictive property and durability even under high-temperature and highly humid conditions.
摘要翻译:一种压电/电致伸缩陶瓷组合物,其包含作为主要成分的Pb(Mg 1/3 N 2 Nb 3/3)O 3 -PbTiO 三元固溶体系组合物,还含有以NiO和Si计为0.05-3.0质量%的量为0.003至0.01的Ni 质量%SiO 2。 压电/电致伸缩陶瓷组合物可以构成即使在高温高湿条件下也具有优异的压电/电致伸缩性能和耐久性的压电/电致伸缩体或压电/电致伸缩部分。
摘要:
There is disclosed a method of manufacturing a piezoelectric element including a step of preparing a green sheet A including a portion which becomes a fired piezoelectric body later, by use of a piezoelectric material; a step of joining, to at least one surface of the green sheet A, a green sheet B having an opening in a portion facing the portion which becomes the fired piezoelectric body later, followed by firing to obtain the fired piezoelectric body provided with a reinforcing plate to which the reinforcing plate formed owing to the firing of the green sheet B is attached; and a step of forming a film-like electrode in a portion obtained by the firing of the green sheet A in the fired piezoelectric body provided with the reinforcing plate.
摘要:
A piezoelectric/electrostrictive element having a double-layer structure in which a lower layer electrode film, a lower layer piezoelectric/electrostrictive film, an inner layer electrode film, an upper layer piezoelectric/electrostrictive film and an upper layer electrode film are laminated in this order on a thin portion of a substrate. In the piezoelectric/electrostrictive element, a driving signal is applied between an outer layer electrode film and the inner layer electrode film, whereby the thin portion and a laminate can be subjected to bending vibration. The piezoelectric/electrostrictive film has film thickness distribution in which a film thickness becomes larger in a continuous manner from a center portion of a bending vibration region which is an antinode of a bending first mode toward an edge portion of the bending vibration region which is a node of the bending first mode, along a short side direction of the bending vibration region.
摘要:
There is provided a method for manufacturing a piezoelectric actuator where the planar shape is adjusted by subjecting the piezoelectric body layer located on one of the outer surfaces in the two or more piezoelectric body layers to a polarization treatment to control remnant polarization of the piezoelectric body layer. The piezoelectric actuator is used as a drive portion of a piezoelectric drive type variable capacitor. The variable capacitor has high mechanical strength and excellent reliability for a long period of time. The relation between the displacement amount of the piezoelectric actuator and the capacity of the capacitor is stable, and the variable capacity is wide.
摘要:
There is disclosed a piezoelectric device which has a remarkably high piezoelectric characteristic and which is superior in a vibration transmitting property between a substrate and a piezoelectric portion and in which linearity of a flexural displacement with respect to a voltage is high up to a high voltage region and which exhibits a high durability even in a case where the device is used with a large flexural displacement for a long period. The piezoelectric device is provided with: a substrate 2 made of a ceramic; a piezoelectric portion 1 constituted of a piezoelectric porcelain composition containing as a major component a Pb(Mg, Ni)1/3Nb2/3O3—PbZrO3—PbTiO3 ternary solid solution system composition represented by a predetermined formula; and an electrode 3 electrically connected to the piezoelectric portion 1, and the piezoelectric portion 1 is solidly attached onto the substrate 2 directly or via the electrode 3.
摘要翻译:公开了一种具有非常高的压电特性的压电器件,其在衬底和压电部件之间的振动传递性能优异,并且其中相对于电压的弯曲位移的线性度高达高电压区域 并且即使在长期使用具有大的弯曲位移的装置的情况下也显示出高的耐久性。 压电装置设置有:由陶瓷制成的基板2; 由作为主成分的Pb(Mg,Ni)1/3 Nb 3/3/3 O 3的压电陶瓷组合物构成的压电体1, 由预定公式表示的三元固体溶液体系组合物; 以及电连接到压电部分1的电极3,并且压电部分1直接或经由电极3牢固地附接到基板2上。
摘要:
A piezoelectric/electrostrictive actuator, including a piezoelectric/electrostrictive element that includes at least one laminate including one piezoelectric/electrostrictive layer and one pair of electrodes disposed respectively on both sides of said piezoelectric/electrostrictive layer and has a moving part corresponding to a portion where said piezoelectric/electrostrictive layer is sandwiched by one pair of said electrodes and a non-moving part corresponding to a portion where said piezoelectric/electrostrictive layer is not sandwiched by one pair of said electrodes, and a moisture proof membrane disposed to cover at least the proximity of the boundary between said moving part and said non-moving part and consisting of silicone-based organic insulation material with storage elastic modulus of 100 kPa or less obtained by dynamic viscoelastic measurement using a parallel cone with diameter of 25 mm under a condition with strain of 0.1%, frequency of 1 Hz, gap of 0.5 mm and temperature of 22° C.